Spare Parts

Quartz Crystal Microbalance (QCM)

For in-situ thin film growth monitoring.

For in-situ thin film growth monitoring

Quartz Chrystal Microbalance (QCM) is a cost efficient and accurate film growth measurement tool for ALD depositions. It is an economical way to get film growth data during the deposition when compared to ellipsometer measurements.

Reaction Chamber top lid with feedthroughs for integrated QCM sensor head

QCM also allows the true “in-situ” measurement compared to many ellipsometer integrations where deposition needs to be halted during the measurement. 

AIO3 film thickness growth vs time, a range of 1 minute
AIO3 film thickness growth rate vs time, a range of 1 minute

The Beneq QCM option can be easily installed on any TFS 200 with a thermal reaction chamber, and includes all needed parts and services for start-up on-site.

The QCM option is compatible with manual and load-lock reaction chambers with slight modifications.

Quartz Crystal Microbalance QCM-200

The quartz crystal microbalance upgrade includes:

  • QCM compatible vacuum chamber top flange, vacuum chamber top flange with 2 pieces of feedthrough ports
  • QCM compatible reaction chamber top lid for integrating the Colnatec QCM-head to the top flow channel of the reaction chamber. Material aluminium, maximum temperature rating up to 350 °C. Lid is compatible with an existing chamber.
  • Installation and commissioning at site when purchased as an upgrade to an existing TFS 200

QCM measurement components:

  • Colnatec Phoenix Sensor Head
  • Feedthrough with KF40
  • Colnatec EonLT Monitor, Temperature measuring film thickness monitor. The combination of frequency and temperature measurement allows unprecedented accuracy in real-time rate and film thickness monitoring.
  • Software and cable
  • 3 pcs of crystals for 3 different temperature ranges

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