For depositing precursors with low vapor pressure

The hot source HS 300 options support the versatility and modularity of the Beneq TFS 200 research platform in the following ways:

• enable the use of more precursors and processes
• are necessary when depositing precursors with low vapour pressure
• almost all liquid and solid precursors can be used with HS 300 (e.g., HfCl4, ZrCl4, beta-diketonates, amides, cyclopentadienyl, etc.)
• processes MgO, HfO2, SiO2, Ta2O5, ZrO2
• high evaporation area as well as load-and-release mode allow lowest possible precursor temperature
• minimal precursor decomposition
• Large volume container, max. filling 400 ml, with manual input and output valves
• Three heated zones design

Hot Source HS300

• for e.g. HfCl4, ZrCl4, beta-diketanotes
• high evaporation area and load-and-release mode allow using the lowest possible precursor temperature
• minimal precursor decomposition
• fast heating
• optional container particle filtration (patented) system available
• precursor container must be purchased separately
• Hot source for up to 300 °C line temperature for one precursor source container.

Dual Hot Source DHS 300

• dual sources for two separate HS 300 sources inside a combined frame
• for e.g. HfCl4, ZrCl4, beta-diketanotes
• high evaporation area and load-and-release mode allow using the lowest possible precursor temperature
• minimal precursor decomposition
• maximum temperature difference is 100 °C between the two sources
• optional container particle filtration (patented) system available
• precursor container must be purchased separately
• Dual hot source for up to 300 °C for two precursor source containers.

Hot Source Precursor Containers HS 300-PC/OP and HS 300-PC/DOT

• used with hot source HS 300
• container volume 580 ml (max. filling rate 400 ml). Use of separate containers for different precursors prevents cross contamination
• two types of containers available: with removable lid to be filled locally, and all-welded design for safe transportation
• compatible with HS 300 and DHS 300
• HS 300-PC/OP: material stainless steel with container and all line parts. Container flange with different CF-gasket materials. Intended to be filled with precursor locally in glove box, removable lid design with metal sealing.
• HS 300-PC/DOT: material stainless steel. All-welded design with VCR-connections. DOT* certified