Fluidized bed reactor (FBR)

For truly conformal coating of fine powders

The Fluidized Bed Reactor (FBR)  chamber is a versatile particle coating option for the Beneq TFS 200.

With the FBR chamber you get :

• an easy-to-mount, easy-to-remove reactor assembly
• truly conformal coating of fine powders
• a chamber-in-chamber design providing the highest process versatility and coating quality
• an easily removable coating chamber that simplifies loading and unloading of powders

Beneq recommends the use of a QMS (Quadruple Mass Spectrometer) for in-situ analysis and process development. A QMS integration is available from Beneq as an upgrade to an existing TFS 200. Learn more about the QMS option here.

Learn more about atomic layer deposition (ALD) powder coating with a Beneq TFS 200 fluidized bed reactor (FBR) here!

• excellent uniformity
• best results for coating fine powders
• particles kept fluid by both using gas flow through the reactor and by vibrating the reactor module itself
• observation windows are included in the module so that you can observe the fluidization process – this is extremely useful when you’re setting the minimum fluidization velocity
• stainless steel reactor available for high temperature depositions and production use
• both glass and stainless steel can be used with the same FBR setup
• the optional residual gas analyzer (RGA) provides in-situ analysis and provides real-time data to your PC
• FBR 200: for uniform coating of particles down to 100 nm.