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Semiconductor ALD

Beneq Transform® Series

Beneq Transform® XP

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Beneq Transform® XP combines mini-batch thermal ALD, plasma-enhanced ALD with a proprietary in-cycle annealing step to deliver uniform films, stable interfaces, and high-quality material properties for advanced power and RF devices.
Beneq Transform®

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Beneq Transform® is a one-stop ALD tool solution for Power Electronics, MEMS and Sensors, RF, LED, Photonics, and Advanced Packaging applications.
Beneq Transform® 300

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Beneq Transform® 300 combines thermal and plasma ALD in an integrated 300 mm cluster tool for MtM applications including CIS, Power, Micro-OLED/LED, and Advanced Packaging.