Semiconductor ALD

Beneq Transmute™

Beneq Transmute™ delivers best-in-class ALD films for high-volume manufacturing, combining plasma pre-treatment, plasma-enhanced ALD, and thermal batch ALD in a high-throughput platform for wide bandgap power, RF, and other specialty devices.

Beneq Transform® XP

Beneq Transform® XP combines mini-batch thermal ALD, plasma-enhanced ALD with a proprietary in-cycle annealing step to deliver uniform films, stable interfaces, and high-quality material properties for advanced power and RF devices.

Beneq Transform®

Beneq Transform® is a one-stop ALD tool solution for Power Electronics, MEMS and Sensors, RF, LED, Photonics, and Advanced Packaging applications.

Beneq Transform® 300

Beneq Transform® 300 combines thermal and plasma ALD in an integrated 300 mm cluster tool for MtM applications including CIS, Power, Micro-OLED/LED, and Advanced Packaging.

Beneq Prodigy™

Beneq Prodigy™ is the simple and elegant ALD solution for high-volume manufacturing of compound semiconductors and MEMS.

Products