Thermal gas line

Thermal gas lines enable gaseous precursors such as NH3, H2S, and SiH4 being pulsed into the ALD reaction chamber in a controlled way.

The thermal gas line options support the excellence and modularity of the TFS 200 research platform:

  • Different gas line options are available for any ALD compatible gaseous precursor
  • Gas line options include the necessary additional hardware and software
  • Depending on the precursor type, there are two levels of safety for thermal gas line options available (non-hazardous or flammable/toxic)

TGL-1 Gas Line

For N2, O2, H2 or Ar.

Includes:

  • Pneumatic pulsing valve, stainless steel tubing with VCR connectors, and orifice for flow adjustment
  • Hardware and software interlocks for non-compatible gas combinations

Please note that Beneq requires the use of gas detection and alarm systems in combination with hazardous gases (detectors can be separately purchased from Beneq).

 

TGL-2 Gas Line for flammable/toxic gases

For NH2, H2S, SixHy or WF6.

Includes:

  • Pneumatic pulsing valve, stainless steel tubing with VCR connectors, and orifice for flow adjustment
  • Hardware/software interlocks for non-compatible gas combinations
  • Double interlock valves on the gas supply
  • Integrated purge line with automated purge control

Please note that Beneq requires the use of gas detection and alarm systems in combination with hazardous gases (detectors can be separately purchased from Beneq)

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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