Quartz Crystal Microbalance (QCM)

Quartz Chrystal Microbalance (QCM) is a cost efficient and accurate film growth measurement tool for ALD depositions. It is an economical way to get film growth data during the deposition when compared to ellipsometer measurements.

Reaction Chamber top lid with feedthroughs
for integrated QCM sensor head


QCM also allows the true “in-situ” measurement compared to many ellipsometer integrations where deposition needs to be halted during the measurement. 

AIO3 film thickness growth vs time, a range of 1 minute


AIO3 film thickness growth rate vs time, a range of 1 minute


The Beneq QCM option can be easily installed on any TFS 200 with a thermal reaction chamber, and includes all needed parts and services for start-up on-site.

The QCM option is compatible with manual and load-lock reaction chambers with slight modifications.


Quartz Crystal Microbalance QCM-200

The quartz crystal microbalance upgrade includes:

  • QCM compatible vacuum chamber top flange, vacuum chamber top flange with 2 pieces of feedthrough ports
  • QCM compatible reaction chamber top lid for integrating the Colnatec QCM-head to the top flow channel of the reaction chamber. Material aluminium, maximum temperature rating up to 350 °C. Lid is compatible with an existing chamber.
  • Installation and commissioning at site when purchased as an upgrade to an existing TFS 200


QCM measurement components:

  • Colnatec Phoenix Sensor Head
  • Feedthrough with KF40
  • Colnatec EonLT Monitor, Temperature measuring film thickness monitor. The combination of frequency and temperature measurement allows unprecedented accuracy in real-time rate and film thickness monitoring.
  • Software and cable
  • 3 pcs of crystals for 3 different temperature ranges



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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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