Quadruple Mass Spectrometer (QMS)

We recommend QMS especially in conjunction with our Fluidized Bed Reactor (FBR) option. It allows analysis of composition of gases exiting the reactor. With this information, the correct length of the ALD pulses can be accurately determined. 

In developing new ALD processes, QMS is very helpful and can speed up the development work tremendously. Again, by analysing the composition of gases exiting the reactor, we can determine if the desired reactions have taken place in the reactor, and we can adjust the process parameters accordingly.

QMS can also be used as a residual gas analyser to make sure that the ALD system is leak-tight, removing the need for an additional He-leak tester.

TFS 200 with QMS installed


Quadruple Mass Spectrometer QMS-200

- MKS Vision 2000-C QMS unit
- continuous in-situ monitoring of ALD process
- minimum detectable concentration: <200 ppb for non-interfering species
- software for data acquisition and interpretation
- can be used for ALD system leak detection
- integration to TFS 200 pump line
- pump line heater from ALD system vacuum chamber outlet to the QMS unit

Installation and commissioning at site when purchased as an upgrade to an existing TFS 200.


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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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