Fluidized Bed Reactor (FBR)

The Fluidized Bed Reactor (FBR)  chamber is a versatile particle coating option for Beneq TFS 200.

With the FBR chamber you get :

  • an easy-to-mount, easy-to-remove reactor assembly
  • truly conformal coating of fine powders
  • a chamber-in-chamber design providing the highest process versatility and coating quality
  • an easily removable coating chamber that simplifies loading and unloading of powders

Beneq recommends the use of a QMS (Quadruple Mass Spectrometer) for in-situ analysis and process development. A QMS integration is available from Beneq as an upgrade to an existing TFS 200. Learn more about the QMS option here.

Learn more about atomic layer deposition (ALD) powder coating with a Beneq TFS 200 fluidized bed reactor (FBR) here!

Fluidized bed reactor (FBR)

  • excellent uniformity
  • best results for coating fine powders
  • particles kept fluid by both using gas flow through the reactor and by vibrating the reactor module itself
  • observation windows are included in the module so that you can observe the fluidization process – this is extremely useful when you’re setting the minimum fluidization velocity
  • stainless steel reactor available for high temperature depositions and production use
  • both glass and stainless steel can be used with the same FBR setup
  • the optional residual gas analyzer (RGA) provides in-situ analysis and provides real-time data to your PC
  • FBR 200: for uniform coating of particles down to 100 nm size.


Contact Lumineq

6 + 3 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.

Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

Proceed to download

2 + 3 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.