Ellipsometer

An integrated ellipsometer offers the best possible metrology for measuring ultra-thin films for advanced ALD applications in nanometer scale. Now the ellipsometer can be installed also as an upgrade to an existing TFS 200 ALD tool. This is achieved by installing load-lock with ports for ellipsometer measurement heads on the existing TFS 200.

In new TFS 200 products, the ellipsometer is integrated directly to a vacuum chmaber allowing true in-situ measurements.

 

 

Ellipsometer Load-Lock enables a Film Sense FS1 or Woollam iSE ellipsometer cost-efficient integration to your existing TFS 200 ALD tool to monitor film growth without breaking the vacuum conditions during measurement.

This upgrade offers a completely new dimension for studying  the ALD film growth.


 

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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