Beneq and LETI open ALD-dedicated research laboratory in St. Petersburg

On November 15, Beneq and Saint Petersburg Electrotechnical University (LETI) officially opened the ALD Application Laboratory (ALD AppLab) in St. Petersburg, Russia. The laboratory, a concrete step in boosting thin film research in Russia, is the next step for Beneq in building a notable and ever-growing business around ALD* in Russia. Also, by creating a cradle for ALD-based research and development, Beneq and LETI together acknowledge the considerable pool of thin film and especially ALD know-how that exists but still lies untapped in Russia today.
   * Atomic Layer Deposition

The ALD AppLab is a concrete research resource dedicated to thin film science. The laboratory will focus on fostering research and scientific development into industrial applications, with a strong emphasis on atomic layer deposition (ALD) as an enabling technology. Also, it will be a basis for education in the area of ALD at LETI.

In the words of Beneq CEO, Mr Sampo Ahonen, “The launching of the ALD AppLab is, on the one hand, a major step in the grand plan Beneq has for building an unrivalled presence in Russia, alongside its already established subsidiary OOO Beneq in St. Petersburg. On the other hand, ALD AppLab provides an unprecedented opportunity for Russia’s widely acknowledged ALD science to develop into tangible applications and industrial production. In effect, we expect the ALD AppLab to speed up the transition of ALD from academic science into new and profitable business. This is also why we hope to see academia and industry working side by side on mutual development projects.”

ALD enables managing material at an atomic level by applying layers of a certain element composition, structure or thickness to a substrate, and also achieving precise coating parameter control. Applications of ALD thin film technology include enhancing the efficiency of solar cells, improving optical properties of glass and protecting sensitive electronics from early deterioration.

The collaboration platform established for ALD AppLab extends far beyond Beneq and LETI to academia, other centers of excellence and companies, in Russia as well as abroad. ALD AppLab activities will be aimed at offering a wide range of thin film research and development services: basic chemistry, process development, coating operations, proof-of-concept, product prototyping and small-scale piloting.

Please visit the homepage of ALD AppLab:

For more information, please contact:
Mr Sampo Ahonen, CEO, Beneq
Tel: +358 40 520 1090
e-mail: sampo.ahonen(at)

Beneq, a leading supplier of production and research equipment for thin film coatings, is also the world’s premier manufacturer and developer of thin film electroluminescent (TFEL) displays. Beneq thin film equipment is used for thin film coatings in solar photovoltaics, flexible electronics, strengthened glass and other emerging thin film applications. Industry-proven Beneq equipment and thin film experience is used for improving the efficiency of crystalline silicon and thin film solar cells, producing transparent conductive oxide (TCO) coated glass and making touch screen glass more durable. Beneq has introduced several revolutionary innovations within its coating technologies, including roll-to-roll atomic layer deposition (ALD) and high-yield atmospheric aerosol coating (nAERO®). In addition to process equipment, Beneq also offers Thin Film Coating Services.

Read the news in PDF-format (ENG).

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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