Throughput Revolution

Next level of wafer capacity for ALD equipment

Beneq is on a mission to introduce ALD to a whole new set of industrial applications. Earlier, we have talked about fast ALD, spatial ALD solutions and next generation ALD equipment that changes the standards of throughput for industrial ALD production.

Next, our plan is to start a throughput revolution in ALD for the semiconductor industry.

Beneq already offers a whole range of services for industrial processing of wafers and automated batch wafer equipment for high volume manufacturing. Beneq also provides many spatial ALD solutions that are suitable for high volume manufacturing of wafer coatings in the semiconductor and MEMS industry.

But there is more to come. In Semicon Europa in November, we will introduce our latest new equipment for wafer ALD, with special focus on emerging ALD markets, such as Power and RF devices, MEMS and piezoelectric sensors and actuators, RF MEMS and image sensors, LED and OLED. Make sure to follow the news!

If you are planning to visit Semicon Europa, you should find the time to come and meet us (Hall B1, stand 1767). You can also visit our Semicon Europa event web page and book a meeting with our team.

We are looking forward to seeing you in Munich.

Contact Lumineq

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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