Black ALD Magic

Increasing solar cell efficiency with atomic layer deposition

A very interesting doctoral dissertation in the field of semiconductor technology will be defended tomorrow in the Department of Micro- and Nanosciences of Aalto university School of Electrical Engineering.

Päivikki Repo is defending her PhD thesis about black silicon passivated by atomic layer deposition. Part of this work contributed to the world record on black silicon solar cell efficiency, published in Nature Nanotechnology last year.

In her research, Päivikki has improved the efficiency of solar cells by passivating the surface with different ALD thin film coatings with good results.

Surface passivation becomes even more important in the case of black silicon (b-Si). In the thesis, Päivikki presents that ALD Al2O3 can solve the issue of increased surface re-combination by providing completely conformal coatings and excellent passivation also on nanostructured surfaces. This proves the potential of using the combination of black silicon and ALD Al2O3 in different photovoltaic devices.

As is often the case with demanding ALD research applications, the ALD layers in Päivikki’s research were accomplished using Beneq ALD equipment.

We congratulate Päivikki and wish her all the best in her defense on Friday!

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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