Markets and Applications

Functional ALD coatings for batteries, solar, and flexible electronics. The Genesis ALD is ideal for coating any roll-format substrates, and for multiple functional applications.

  • Passivation of cathodes and anodes for various types of lithium-ion and solid-state batteries
  • Conductive layers and encapsulation for flexible solar cells
  • Moisture barriers for flexible electronics

Learn how ALD enables safer and higher performance batteries

Material Selection

Wide selection of ALD materials to meet your requirement. For years Beneq has pioneered roll-to-roll ALD systems for R&D and industrial production. Our common materials include Al₂O₃, TiO₂, ZnO, ZnS, SiO₂, or any other material on request.

 

Feature Highlights

  • Web width: max. 420mm
  • ALD coating thickness: max. 100nm
  • Dynamic deposition rate (Al2O3): 10 nm *m/min
  • Process temperature: max. 250°C

Customization

At maximum 420mm web width, the Genesis ALD is suitable for lab R&D or pilot scale production. Designed to handle ALD films onto flexible substrates such as polymer or metal. Working with our partner E+R Group, the leading roll-to-roll vacuum coater company, we offer customers optional designs for wider webs and line integration.

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Tech Specs

Machine Speed Production Minimum 0.1 m/min

Machine Speed Production

Minimum 0.1 m/min

Production Maximum 20 m/min

Production Maximum 20 m/min

Web Material Copper, Aluminum, Stainless steel, polymer, paper and other substrates suitable for vacuum coating

Web Material

Copper, Aluminum, Stainless steel, polymer, paper and other substrates suitable for vacuum coating

Incoming Reel Web Width Maximum 420 mm Web Width Minimum 100 mm

Incoming Reel

Web Width Maximum 420 mm Web Width Minimum 100 mm

Diameter Maximum 400 mm

Diameter Maximum 400 mm

Core ID 152 mm

Core ID 152 mm

Interleave winders Optional Interleave diameter maximum 150 mm

Interleave winders Optional Interleave diameter maximum 150 mm

ALD Materials Al₂O₃, TiO₂, ZnO, ZnS, SiO₂, and more

ALD Materials

Al₂O₃, TiO₂, ZnO, ZnS, SiO₂, and more

Maximum Temperature 250 ºC

Maximum Temperature

250 ºC

Cleanroom collaboration stock

Looking to adopt ALD in your product design and production?

Learn more about Beneq’s Development Service. Visit our FAQ page for expert guidance.

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Speak to an expert about Genesis

If you are an existing customer seeking support, upgrades or spare parts, please use our Support form.