Products

Spatial ALD Equipment

Roll-to-roll or rotary ALD systems for flexible substrates in R&D and production. Custom-build based on your specific requirements.


Beneq WCS 600

Large-area, roll-to-roll ALD system for R&D and pilot production. With a unique design the precursor separation on the ALD head is achieved by maintaining both a differential pressure and an exhaust/purge/exhaust structure that allows a spacing for the substrate to pass through. The ALD head swings back and forth to achieve roll speeds up to 10 meters per minute on substrates such as polymers, metals and flexible glass.

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Beneq C2R

Wafer plasma batch processing is revolutionized through this rotary, spatial ALD tool. By doing away with pulsing and purging of precursors, the substrate rotates through various reactive and purging zones to achieve unparalleled throughput and simplicity.

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