Large-area, roll-to-roll ALD systems for flexible substrates in R&D and production. Custom-build based on your specific requirements.
Operating under vacuum pressures similar to our other tools, the precursor separation on the ALD head is achieved by maintaining both a differential pressure and an exhaust/purge/exhaust structure that allows a spacing for the substrate to pass through. The ALD head swings back and forth to achieve roll speeds up to 10 meters per minute on substrates such as polymers, metals and flexible glass.See product
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