Quadruple Mass Spectrometer (QMS)
For process development, DBR process monitoring and system leak checking.
For process development, FBR process monitoring and system leak checking
We recommend QMS especially in conjunction with our Fluidized Bed Reactor (FBR) option. It allows analysis of composition of gases exiting the reactor. With this information, the correct length of the ALD pulses can be accurately determined.
In developing new ALD processes, QMS is very helpful and can speed up the development work tremendously. Again, by analysing the composition of gases exiting the reactor, we can determine if the desired reactions have taken place in the reactor, and we can adjust the process parameters accordingly.
QMS can also be used as a residual gas analyser to make sure that the ALD system is leak-tight, removing the need for an additional He-leak tester.
- TFS 200 with QMS installed
Quadruple Mass Spectrometer QMS-200
– MKS Vision 2000-C QMS unit
– continuous in-situ monitoring of ALD process
– minimum detectable concentration: <200 ppb for non-interfering species
– software for data acquisition and interpretation
– can be used for ALD system leak detection
– integration to TFS 200 pump line
– pump line heater from ALD system vacuum chamber outlet to the QMS unit
Installation and commissioning at site when purchased as an upgrade to an existing TFS 200.
