Spares & upgrades

Fluidized Bed Reactor (FBR)

For truly conformal coating of fine powders

The Fluidized Bed Reactor (FBR)  chamber is a versatile particle coating option for the Beneq TFS 200.

With the FBR chamber you get :

  • an easy-to-mount, easy-to-remove reactor assembly
  • truly conformal coating of fine powders
  • a chamber-in-chamber design providing the highest process versatility and coating quality
  • an easily removable coating chamber that simplifies loading and unloading of powders

Beneq recommends the use of a QMS (Quadruple Mass Spectrometer) for in-situ analysis and process development. A QMS integration is available from Beneq as an upgrade to an existing TFS 200. Learn more about the QMS option here.

Learn more about atomic layer deposition (ALD) powder coating with a Beneq TFS 200 fluidized bed reactor (FBR) here!

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