Research

Beneq is the most installed ALD equipment provider for academic research and corporate R&D. Our products have been designed to minimize cross contamination in a multi-user research environment. Wide range of options and upgrades for the most demanding research requirements.

Product TFS 200 TFS 500
Dimensions 720 x 1340 x 1280 mm 1600 x 900 x 1930 mm
Chamber volume 200 x 95 mm (diameter x height) 200 x 170 mm (diameter x height)
Usage Research, Production Research, Production
Integration Cluster Cluster
Temperature Range 25-500 °C 25 – 500 °C
Very Low Vapor Pressure Precursors Yes Yes