As semiconductor architectures shift toward 3D logic and memory, part coatings must withstand stronger plasma exposure, higher corrosion risk and tighter particle control. This SEMI Europe webinar with Beneq explains how atomic layer deposition (ALD) supports new coating needs for critical chamber parts. Dr. Alexander Perros will outline market trends, material choices and practical approaches for the 3D transition. Fill the form below to view the Webinar recording.
Event has ended
What You Will Learn
- See how 3D architectures like GAA, CFET, 3D NAND and DRAM are changing part coating requirements
- Learn how ALD complements anodization and plasma spray, creating new business opportunities
- Get timelines, material options and integration strategies for ALD-based coatings
- Review market forecasts and positioning strategies for sub-10nm readiness
- Discover ways to extend part lifetime, reduce contamination and boost yield
Who Should Watch
- Part manufacturers navigating 3D logic and memory demands
- Coating providers exploring ALD as a complementary offering
- Fabs and OEMs focused on advanced node performance and yield
- R&D and engineering teams qualifying coatings for reliability and yield in advanced nodes
About the Speaker
Alexander Perros
Business Development Director, ADVA, Beneq Oy
Dr. Alexander Perros leads business development for Beneq’s Advanced ALD Business Unit. With over 15 years in semiconductor R&D, manufacturing and materials, he brings deep expertise in ALD, process integration and thin films, built through roles at Beneq, Summa Semiconductor, and as co-founder of cleanroom services firm Nanovate.