Beneq C2R is the spatial ALD member of our cluster-compatible equipment family. Beneq C2R takes the Plasma Enhanced ALD (PEALD) process to a fully new level – for the first time, PEALD can be used in high volume manufacturing. Because of the plasma enhanced rotary ALD process, the Beneq C2R is ideal for thick ALD films, even up to several micrometers.

Beneq C2R provides an optimal solution for high performance ALD in industrial applications, such as optical coatings and barriers. The Beneq C2R is the ideal product when speed, cost, low process temperature, and the highest possible film quality are the driving factors.

 

“We were surprised by ALD’s simple adaptation to optical coatings.”

Dr. Andreas Wienke, Laser Zentrum Hannover (LZH)

Technical highlights

  • Ultra-high deposition rates, up to several micrometers per hour
  • Batch PEALD process for up to 7 pcs of 200 mm wafers
  • For lenses and other 3D substrates with thickness up to 30 mm
  • High film thickness uniformity, suitable for demanding optical coating applications
  • Can be equipped with a load lock or wafer automation.

Automation Option

The Beneq C2R features an automation option based on the trusted MX400 transfer module by Brooks Automation. Included in the automation offer:

  • Brooks MX400 cluster based module
  • Dual arm vacuum robot
  • Sample aligner
  • Optional preheating and cooling

Tech Specifications C2R

Tech Specs

Process type
Rotary spatial plasma Enhanced ALD Single side coating
Usage
Production
Substrate type
Up to 200 mm wafer
Substrate loading
Automatic, Manual
Main dimensions
3770 x 1340 x 1280 mm
Integration
Cluster
Process temperature range
25 – 200 °C
Batch capacity
7 pcs 200 mm wafer
Maximum rotational speed
200 rpm
Deposition rate
Up to 1.5 µm/h
Plasma gas lines
Up to 3
Precursor lines (ambient to 120 °C)
Up to 4
Plasma type
DC plasma
Control system
PLC control with PC user interface
Process control
Recipe-based; fully configurable
Cleanroom collaboration stock

Looking to adopt ALD in your product design and production?

Learn more about Beneq’s Development Service. Visit our FAQ page for expert guidance.

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