BeneqCare® Support Services

While standard technical support is complimentary for all Beneq customers, elevate your support with BeneqCare® to minimize downtime and maximize your tool’s productivity.

The Beneq R2 Research Product will be discontinued as of November 27, 2024.

Read more

BeneqCare® in a nutshell

Technical support services

Accessible support levels for your ALD tool. Support response available in 6 hours from request or next-day within 24 hours from request, depending on your needs. Remote support options can also be added on.

Onsite services

Onsite maintenance options to ensure reliable throughput. BeneqCare options include preventative maintenance, corrective maintenance, onsite Beneq engineers, and user and maintenance training for your personnel.

Spare part services

Flexible options for spare parts services offer cost-effective approaches for optimizing availability. All BeneqCare customers also enjoy benefits on original Beneq spare parts with a 5% discount on all parts orders.

Cleanroom maintenance

Your Preferred Response Time

Choose your preferred response time from same day (6h) to next day (24h) response time.

Modern Remote Support Solutions

Enjoy peace of mind with BeneqCare®’s modern support technology. Choose between our Remote AR support or a Remote Support VPN for modern troubleshooting and maintenance support.

On-Site Services

Enjoy a longer life cycle and uptime performance by choosing one of BeneqCare®’s on-site services. Our most recommended preventative maintenance option ensures your tool’s optimal performance.

Priority Spare Parts

With BeneqCare®’s, benefit from a 5% discount on spare parts, and peace of mind with priority during shortages.

View Brochure Arrow