Spareparts & Upgrades

Ellipsometer

Ellipsometer

Monitor ultra-thin films in nm scale An integrated ellipsometer offers the best possible metrology for measuring ultra-thin films for advanced ALD applications in nanometer… Read more

Fluidized bed reactor (FBR)

Fluidized bed reactor (FBR)

For truly conformal coating of fine powders The Fluidized Bed Reactor (FBR) chamber is a versatile particle coating option for the Beneq TFS 200.… Read more

High Aspect Ratio (HAR) reaction chamber

High Aspect Ratio (HAR) reaction chamber

For demanding high aspect ratio substrates Beneq offers a series of reaction chambers specifically designed for coating demanding high aspect ratio (HAR) substrates. From… Read more

Hot source HS 300

Hot source HS 300

For depositing precursors with low vapor pressure The hot source HS 300 options support the versatility and modularity of the Beneq TFS 200 research… Read more

Hot source HS 500

Hot source HS 500

Flexibility though easy use of multiple chemistries The hot source HS 500 options support the versatility and modularity of the TFS 200 research platform… Read more

Liquid source

Liquid source

Flexibility through easy use of multiple chemistries Beneq’s liquid source options support the versatility and modularity of the Beneq TFS 200 research platform. With… Read more

Ozone gas options

Ozone gas options

For use of ozone gas in thermal ALD depositions Beneq ozone line and generator options for the TFS 200 allow ozone gas to be… Read more

Plasma-enhanced ALD (PEALD)

Plasma-enhanced ALD (PEALD)

For TiN, SiO2, AI203 and SiN processes and high-speed processing With plasma-enhanced ALD (PEALD) options for TFS 200, you get: Please note that either… Read more

Quartz Crystal Microbalance (QCM)

Quartz Crystal Microbalance (QCM)

For in-situ thin film growth monitoring Quartz Chrystal Microbalance (QCM) is a cost efficient and accurate film growth measurement tool for ALD depositions. It… Read more

Quadruple Mass Spectrometer (QMS)

Quadruple Mass Spectrometer (QMS)

For process development, FBR process monitoring and system leak checking We recommend QMS especially in conjunction with our Fluidized Bed Reactor (FBR) option. It… Read more

Reaction chambers

Reaction chambers

Cross-flow precursor delivery for excellent thin film uniformity Beneq reaction chambers support the excellence and modularity of the TFS 200 research platform. There are… Read more

Thermal gas line

Thermal gas line

For controlled gaseous precursors pulsing Thermal gas lines enable gaseous precursors such as NH3, H2S, and SiH4 being pulsed into the ALD reaction chamber… Read more

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