For use of ozone gas in thermal ALD depositions

Beneq ozone line and generator options for the TFS 200 allow ozone gas to be used in thermal ALD depositions.

The ozone gas option cabinet includes:

  • An ozone generator
  • Flow adjustment devices
  • Ozone reservoir and destructor

Ozone line O3

The ozone line O3 option includes all parts for using ozone gas. It is fully integrated into the TFS 200 electrical and software systems.

Pictured here without its cover (cover included in the package)
  • Ozone generator 803N (BMT Messtechnik GmbH)
    with 8 g/h ozone production
  • Includes pressure regulator, rotameter, pneumatic pulsing valve,
    stainless steel tubing with VCR® (Swagelok) fittings,
    outlet for flow adjustment and ozone destructor
  • Integration with TFS 200 electrical cabinet for power feed
  • Ozone cabinet with ventilation connection

Please note that Beneq requires use of gas detection and alarm systems in combination with hazardous gases (detectors can be separately purchased from Beneq).

Ozone analyzer

The Ozone analyzer is used for measuring ozone concentration. The product is manufactured by BMT Messtechnik GmbH.

  • Stainless steel and PFA tubing with VCR® – and Swagelok fittings
  • Integration into TFS 200 electrical cabinet and control system
Spare Parts

Spare Parts and Upgrades

All Beneq products have been designed with flexibility and usability in mind. With the right options and upgrades you will always have the optimal equipment setup that will grow with you. The right configuration will also help you to decrease your valuable production downtime, maintenance, and repair costs. Below you will find more information about the many options and upgrades available.

Learn more