Flexibility though easy use of multiple chemistries

The hot source HS 500 options support the versatility and modularity of the TFS 200 research platform in the following ways:

• Excellent for ALD precursor chemistry research
• Enables use of precursors with very low vapor pressure (e.g. HfCl4, ZrCl4, beta-diketonates, amides, cyclopentadienyl, etc.)
• Small precursor quantities
• Easy and fast precursor filling and fast heating time
• Hot source HS 500 enables the use of precursors and processes that require higher temperatures than the HS 300 can accommodate
• Fast precursor loading and unloading

Hot source HS 500

• for low vapor pressure liquids and solids
• enables precursor heating up to 500°C
• heated delivery line prevents precursor condensation
• very easy precursor change
• 5 ml glass crucible included
• water-cooled casing for safety
• for corrosive high-temperature processes a stainless steel reaction chamber is needed.

Precursor crucible for HS 500

• Container for precursor chemical
• Two material options, borosilicate glass and quartz
• HS-500-PC/B: Material borosilicate glass, up to 350 °C
• HS-500-PC/Q: Material Quartz, up to 500 °C