Hot source HS 300

For depositing precursors with low vapor pressure

The hot source HS 300 options support the versatility and modularity of the Beneq TFS 200 research platform in the following ways:

• enable the use of more precursors and processes
• are necessary when depositing precursors with low vapour pressure
• almost all liquid and solid precursors can be used with HS 300 (e.g., HfCl4, ZrCl4, beta-diketonates, amides, cyclopentadienyl, etc.)
• processes MgO, HfO2, SiO2, Ta2O5, ZrO2
• high evaporation area as well as load-and-release mode allow lowest possible precursor temperature
• minimal precursor decomposition
• Large volume container, max. filling 400 ml, with manual input and output valves
• Three heated zones design

Hot Source HS300

• for e.g. HfCl4, ZrCl4, beta-diketanotes
• high evaporation area and load-and-release mode allow using the lowest possible precursor temperature
• minimal precursor decomposition
• fast heating
• optional container particle filtration (patented) system available
• precursor container must be purchased separately
• Hot source for up to 300 °C line temperature for one precursor source container.

Dual Hot Source DHS 300

• dual sources for two separate HS 300 sources inside a combined frame
• for e.g. HfCl4, ZrCl4, beta-diketanotes
• high evaporation area and load-and-release mode allow using the lowest possible precursor temperature
• minimal precursor decomposition
• maximum temperature difference is 100 °C between the two sources
• optional container particle filtration (patented) system available
• precursor container must be purchased separately
• Dual hot source for up to 300 °C for two precursor source containers.

Hot Source Precursor Containers HS 300-PC/OP and HS 300-PC/DOT

• used with hot source HS 300
• container volume 580 ml (max. filling rate 400 ml). Use of separate containers for different precursors prevents cross contamination
• two types of containers available: with removable lid to be filled locally, and all-welded design for safe transportation
• compatible with HS 300 and DHS 300
• HS 300-PC/OP: material stainless steel with container and all line parts. Container flange with different CF-gasket materials. Intended to be filled with precursor locally in glove box, removable lid design with metal sealing.
• HS 300-PC/DOT: material stainless steel. All-welded design with VCR-connections. DOT* certified