Area-Selective Approaches for Atomic Layer Processing with Mikko Ritala
ALD Stories Ep. 10
ALD Stories Ep. 10
In the 10th installment of ALD Stories, Tyler meets up with Professor Mikko Ritala at the University of Helsinki. A professor of chemistry and renowned ALD scientist, Mikko has been working with ALD since the 90s. Following a stellar lab tour, Tyler and Mikko discuss ALD activities at the University of Helsinki, including their new tools, work on area-selective processing and partnership with ASM Microchemistry.
In this video:
00:00 – Intro
02:30 – The Ritala Lab
09:33 – ALD in the Past
17:05 – Helsinki ALD Cluster Tool
24:26 – Area-Selective ALD & ALE
43:36 – Partnership with ASM
47:49 – Ending & Outro
Follow Mikko and the Helsinki ALD Group on Twitter at @mikkoritala & @HelsinkiALD
Read about the Helsinki ALD Group’s work here: https://www2.helsinki.fi/en/researchgroups/helsinkiald
Follow Tyler on Twitter @TyMyTheALDGuy
Today there are over 60,000 patents worldwide involving Atomic Layer Deposition. However, despite the vast amount of research and development there are only a handful of public conferences where we can meet our fellow researchers and hear more about the work they have done. In this series we will speak to engineers, scientists as well as those working on commercializing the technology in notable new applications. You will hear their personal stories and experiences with ALD.
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