Beneq Podcast
Podcast

Area-Selective Approaches for Atomic Layer Processing with Mikko Ritala

ALD Stories Ep. 10

Clock icon 50 min 8 sec

In the 10th installment of ALD Stories, Tyler meets up with Professor Mikko Ritala at the University of Helsinki. A professor of chemistry and renowned ALD scientist, Mikko has been working with ALD since the 90s. Following a stellar lab tour, Tyler and Mikko discuss ALD activities at the University of Helsinki, including their new tools, work on area-selective processing and partnership with ASM Microchemistry.  
 
In this video: 
00:00 – Intro 
02:30 – The Ritala Lab 
09:33 – ALD in the Past 
17:05 – Helsinki ALD Cluster Tool 
24:26 – Area-Selective ALD & ALE 
43:36 – Partnership with ASM 
47:49 – Ending & Outro 
 
Follow Mikko and the Helsinki ALD Group on Twitter at @mikkoritala & @HelsinkiALD 
Read about the Helsinki ALD Group’s work here: https://www2.helsinki.fi/en/researchgroups/helsinkiald 
Follow Tyler on Twitter @TyMyTheALDGuy

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Area-Selective Approaches for Atomic Layer Processing with Mikko Ritala

Podcast

Today there are over 60,000 patents worldwide involving Atomic Layer Deposition. However, despite the vast amount of research and development there are only a handful of public conferences where we can meet our fellow researchers and hear more about the work they have done. In this series we will speak to engineers, scientists as well as those working on commercializing the technology in notable new applications. You will hear their personal stories and experiences with ALD.

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