Pioneering Atomic Layer Deposition

Beneq is the global leader in industrial atomic layer deposition (ALD) equipment and research since 1984.

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Semiconductors equipment

Automated ALD solutions for high-capacity wafer production.

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Batch Production

Largest scale, general purpose ALD production systems ideal for coating diverse substrate types and thick films.

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Research

Premium, highly flexible ALD research equipment dedicated to academic research and corporate R&D.

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Spatial ALD

Large-area, roll-to-roll atomic layer deposition systems for flexible substrates in R&D and production.

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Discover our solutions

High-performance ALD coating solutions for your market’s interfacial engineering and device optimization challenges.

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Atomic Layer Deposition

What if you could manipulate matter at the nano scale? What if you could build things up a layer of atoms at a time? Wonder no more. Welcome to Atomic Layer Deposition.

Technology

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Pioneering Atomic Layer Deposition

Discover our Products

Semiconductors equipment

Batch Production

Research

Spatial ALD

Discover our solutions

The Latest

View events

Atomic Layer Deposition

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