Atomic-Level Engineering for Advanced Power and RF Devices 

Wide bandgap power and RF devices demand atomic-level control over film quality, interface engineering, and material properties. Beneq Transform® XP meets these demands with enhanced ALD capabilities for technology development and pilot-to-volume manufacturing. 

Its advanced 25-wafer mini-batch thermal reactor delivers fast, uniform deposition – with sub-10-second cycle times and precise conformality across complex topographies. Plasma-enhanced ALD (PEALD) to precisely manage low-energy ions and optimize pre-cleaning, interface passivation, and tunable device performance. 

Transform® XP integrates proprietary in-cycle annealing step that densifies and purifies films, achieving stoichiometric quality and crystallographic alignment. It is the platform of choice for engineering next-generation WBG and RF devices with precision and speed.

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Engineer critical interfaces with confidence 


Advanced control of low-energy species for optimized pre-cleaning, and tunable PEALD processes – enabling superior surface passivation with best-in-class quality and long-term device reliability.

Enable 100-nm thick films in production

High-throughput mini-batch reactor with sub-10-second cycles. Precise gas and pressure dynamics for uniform films across complex topography. 

Advance beyond ALD

In-cycle annealing for densification, purification, and crystallographic alignment. Unlock performance in AlN, Al₂O₃, SiO₂, and beyond.

semiconductors

Application examples

  • Surface passivation of GaN HEMTs
  • Gate oxide for SiC MOSFETs, GaN MISFETs, and vertical GaN devices
  • Surface passivation and etch hardmask for MEMS devices, including RF filters
  • Final passivation of RF and power devices
  • Surface passivation of MicroLEDs and photonics devices
  • Isolation, barrier, and seed layers for TSVs

From the Lab to Pilot Production

Introducing Beneq Transform® XP Lite

Whether supporting low-volume manufacturing or conducting technology development, the Beneq Transform® Lite delivers. It offers the versatility and capabilities of the full Transform platform – at a lower CAPEX investment.

 
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Looking to adopt ALD in your product design and production?

Learn more about Beneq’s Development Service. Visit our FAQ page for expert guidance.

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