Spatial ALD

Roll-to-roll or rotary ALD systems for flexible substrates in R&D and production. Custom-build based on your specific requirements.

Genesis

World’s only commercially available roll-to-roll ALD system

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Beneq C2R™

Beneq C2R™ is the spatial ALD member of our Cluster-compatible equipment family. Beneq C2R takes the Plasma Enhanced ALD (PEALD) process to a fully new level - for the first time, PEALD can be used in high volume manufacturing.

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Looking to adopt ALD in your product design and production?

Learn more about Beneq’s Development Service. Visit our FAQ page for expert guidance.

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