BeneqCare® Technical Support Services

While standard technical support is complimentary for all Beneq customers, elevate your support with BeneqCare® to minimize downtime and maximize your tool’s productivity.

Download Brochure

Elevate your customer experience with BeneqCare®, a premium support package offered exclusively to Beneq customers. With BeneqCare®, you not only receive standard technical support, but also gain access to a wealth of additional benefits. Our team of experts is dedicated to providing you with the highest level of assistance, ensuring that any issues or concerns you may have are addressed promptly and effectively. Plus, with scientific support from our knowledgeable staff, you can rely on us for guidance and expertise when it comes to optimizing the performance of your tool. Invest in BeneqCare® today and unlock the full potential of your equipment while minimizing downtime and maximizing productivity.

Your Preferred Response Time

Choose your preferred response time from same day (6h) to next day (24h) response time.

Modern Remote Support

Enjoy peace of mind with BeneqCare®’s modern support technology. Choose between our Remote AR support or a Remote Support VPN for modern troubleshooting and maintenance support.

On-Site Services

Enjoy a longer life cycle and uptime performance by choosing one of BeneqCare®’s on-site services. Our most recommended preventative maintenance option ensures your tool’s optimal performance.

Priority Spare Parts

With BeneqCare®’s, benefit from a 5% discount on spare parts, and peace of mind with priority during shortages.

BeneqCare® in a nutshell

Technical support services

Accessible support levels for your ALD tool. Support response available in 6 hours from request or next-day within 24 hours from request, depending on your needs. Remote support options can also be added on.

Onsite services

Onsite maintenance options to ensure reliable throughput. BeneqCare options include preventative maintenance, corrective maintenance, onsite Beneq engineers, and user and maintenance training for your personnel.

Spare part services

Flexible options for spare parts services offer cost-effective approaches for optimizing availability. All BeneqCare customers also enjoy benefits on original Beneq spare parts with a 5% discount on all parts orders.

Cleanroom maintenance

Your Preferred Response Time

Choose your preferred response time from same day (6h) to next day (24h) response time.

Modern Remote Support Solutions

Enjoy peace of mind with BeneqCare®’s modern support technology. Choose between our Remote AR support or a Remote Support VPN for modern troubleshooting and maintenance support.

On-Site Services

Enjoy a longer life cycle and uptime performance by choosing one of BeneqCare®’s on-site services. Our most recommended preventative maintenance option ensures your tool’s optimal performance.

Priority Spare Parts

With BeneqCare®’s, benefit from a 5% discount on spare parts, and peace of mind with priority during shortages.