Aerosol thin film technology

Aerosol thin film technology

Industrial scalability and quality of spin coating at atmospheric pressure

Beneq nFOG™ aerosol thin film coating is an advanced wet film coating technology for deposition of wet-based chemistries at room temperature. It provides an energy efficient and cost-effective high-quality deposition technology alternative, which is not limited by scalability issues. Beneq nFOG also solves another major issue of industrial production of high-quality thin films – with Beneq’s nFOG technology, vacuum production is no longer needed.

Benefits of Beneq nFOG aerosol thin film technology:

  • Industrial scalability – same technology from research to full-scale production

  • Coating quality that exceeds other wet film coating technologies

  • Deposition rates of the best industrial coating processes with lower cost of ownership

  • Simple process in room temperature without vacuum

  • Compatible with a large variety of source materials

Flexible coating process

The nFOG technology can be used in either sheet-to-sheet mode or in continuous mode (float, roll-to-roll). The deposition is contact free, which allows for the deposition of highly sensitive and even slightly curved and structured substrates. Also multi-component atomization and wet-on-wet layers can be deposited with the nFOG technology.

The deposition process is based on natural settling of tiny droplets on the substrate. Gravitational settling produces a highly uniform wet layer that is cured after the deposition in order to finalize the coating. The process is compatible with virtually any liquid precursor.

Application areas of Beneq aerosol coating 

Beneq nFOG aerosol thin film coating offers a combination that cannot be achieved with any other wet film coating technology - the quality of spin coating with the scalability of spray coating.

The Beneq nFOG technology has been successfully used for producing anti-reflective coatings, protective coatings, hydrophobic coatings, anti-fog coatings and hydrophilic coatings on a multitude of substrate materials of all sizes. The technology also excels at depositing carbon nanotubes.

Aerosol coating compared to other thin film coating technologies

Beneq nFOG Aerosol vs

Beneq Aerosol thin film coating offers


Similar precursor compatibility

Superior coating uniformity

Smaller surface pressure to substrate


Similar coating uniformity

Superior industrial scalability


Similar coating uniformity

Superior industrial scalability

Download the brochure to read more. Aerosol Brochure

Contact our sales team to hear more.

Contact Beneq

Contact Beneq

Application examples

  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq aerosol thin film equipment is ideal for AR coatings on solar glass.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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