• ALD Equipment

    Beneq offers a wide range of ALD equipment, from flexible research reactors to ultra-fast industrial coating solutions. We also provide a unique portfolio of high capacity roll-to-roll (R2R) and spatial ALD equipment.

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  • Development Services

    If you want to improve your products with Atomic Layer Deposition and ALD services, selecting the right partner is easy: Beneq brings you over thirty years of thin film experience and the world’s largest ALD-dedicated production facility.

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  • Coating Services

    The fastest way to market with a new ALD solution is to outsource the production to Beneq. Beneq coating services is a great way to explore the high-performance ALD technology and thin film coatings with a low threshold and limited risk.

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  • Lifecycle Services

    The Beneq Lifecycle Services team helps you in all aspects of owning an ALD tool. Whether it is spare parts, maintenance, training or an upgrade of your ALD tool, we got you covered.

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Atomic Layer Deposition

Atomic layer deposition, ALD is a thin film technology that enables new and highly competitive products. ALD is also a powerful resource for advanced nanotechnology research. Typical applications of ALD contain a requirement to manufacture very precise nanometer-thick, pinhole-free and totally conformal thin films on any shape and geometry. For today's businesses, Beneq ALD offers the necessary tools to accelerate growth, by means of new and innovative applications, production equipment you can count on and affordable cost of ownership.

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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Latest ALD news

  • 11 Feb
    • Beneq
    Professor Jan Macák of the University of Pardubice explores ALD for coating nanostructures. Using Beneq's TFS 200 tool...
  • 11 Feb
    • Beneq
    Thanks to its luminescence properties there has been a lot of research on red color emission using europium-doped...
  • 11 Feb
    • Beneq
    It's here. Beneq R2 retails for EUR 130 000/ USD 145 000, making it our most affordable tool yet. We’re raising the bar...
  • 9 Feb
    • Beneq
    Moisture barriers are a key application of ALD in 2019. Its pinhole-free, conformal properties offer the ultimate...