Upcoming Webinars

  • Wafer processing ALD for More than Moore semiconductor markets

    In this webinar, Dr Mikko Söderlund, Head of Industrial Applications at Beneq, will go through the challenges and typical application areas of atomic layer deposition in the emerging More than Moore semiconductor markets, such as Power and RF devices, RF and Piezoelectric MEMS, MEMS sensors and actuators, image Sensors, LED and OLED.

    The number of wafers that can be processed with the latest automated cluster ALD solutions is massive compared to traditional ALD equipment. The thermal batch ALD process of the latest equipment, such as Beneq C2, is ideal for oxide and nitride processes used for dielectric, conductor, barrier and passivation purposes and brings both the speed and operation costs of Atomic Layer Deposition to a completely new level that makes full-blown wafer ALD production finally possible.

    Date and Time
    16.05.2018 - 15:00 to 15:45
    Timezone: Europa / Helsinki ( +02:00 )

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