Support Services

To enable you to get the best out of your equipment, we offer the following types of support services:

Process support

The Beneq ALD team can arrange expert level process development support both remotely and at your premises for the agreed period from one week to three months. We can support your recipe optimization, result analysis, the design of an experiment, and finding the best procedures.  Support includes scheduled follow up in the form of weekly teleconference and fast response to immediate issues by phone calls and emails.

Process support benefits:

  • The best possible process support for the situations when it is needed the most.
  • Short process development time; get the results fast!
  • Guaranteed support by email or phone and scheduled follow up meetings keeps the momentum high for fast, high quality results.
  • Unmatched learning opportunity for the customer organization.

ALD system support

 We can support you in equipment usage by assigning a named field service engineer to have a scheduled teleconference on the tool status and guaranteed emergency support with short response times. Remote support through Beneq remote connection is an important part of this support solution. Remote connection hardware and installation are part of the support agreement. 

ALD system support benefits:

  •  Immediate emergency assistance by phone by a qualified Beneq service engineer
  •  Scheduled teleconference on tool status helps keeping the focus and development on-going.
  •  Remote support through Beneq Remote Connection allows quick analysis and problem solving.

On-site support

An experienced ALD field service engineer working on-site for the agreed period. An on-site ALD engineer can support your organization both in equipment and process questions. The main goal of this service is to help our customers to start up the production phase smoothly by being present to help with whatever question or issue may arise.

On-site support benefits:

  •     Agreed period when the best possible support is available at the shortest lead time.
  •     Customer's process engineers will learn ALD technology by working side by side with a seasoned ALD professional.
  •     On-site ALD engineer can help with both equipment and process questions.
  •     Efficient and smooth production ramp-up of an ALD process.

Contact Lumineq

7 + 12 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.

Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

Proceed to download

8 + 11 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.