Beneq ALD Equipment Maintenance Service Plans

To keep your Beneq ALD tool running smoothly, we have the following maintenance contracts and on-demand services available for you:

Extended Life Cycle Services

  • Yearly preventive maintenance visits, including required labor and PM parts.
  • Traveling and accommodation can be included in the contract.  

Premium Life Cycle Services

  • Preventive maintenance and unscheduled maintenance.
  • Includes required labor and parts.
  • Remote connection set-up for quick problem solving.
  • Software upgrades for both the PLC and HMI can be done through the Beneq remote connection.

On-demand Services

  • We have a team of trained professionals to help you if you choose not to select one of our packaged maintenance contracts.
  • Parts, labor and travelling cost are charged separately.


Beneq ALD Maintenance Contract Models  

Coverage Premium Lifecycle Services Extended Lifecycle Services
Preventive Maintenance Labor X X
Preventive Maintenance Parts   X X
Unscheduled Repair Labor   X  
Unscheduled Repair Parts X  
Remote Connection X  

Extended Lifecycle Services Contract

Extended service includes the Preventive Maintenance tasks that a Beneq Field Service Engineer carries out on a Beneq ALD reactor to maximize uptime of the equipment to enable maximum value for our Customer's investment in Beneq technology. The preventive maintenance will be performed by a highly experienced Field Service Engineered trained especially for Beneq TFS Series ALD equipment. 

Preventive maintenance will be performed once a year according to a mutually agreed schedule. The preventive maintenance work consists of tasks performed according the detailed Beneq Preventive Maintenance protocol and duration is two days on site. Spare parts needed to perform preventive maintenance tasks are included. Travel and accommodation are included in the contract price for the ease of budgeting.  

Preventive maintenance is performed according to the detailed protocol that, when completed, forms an exhaustive service report. For the customer the service report will remain as a certificate of the tasks performed and acts also as a certificate of the tool performance level at the time of the maintenance providing a firm ground for any future use.

Premium Lifecycle Services Contract

Additionally, to an exhaustive PM program Beneq Premium Lifecycle Services Contract offers unscheduled maintenance that covers both labor and parts. To solve the unscheduled incidents as fast as possible the Premium Service includes also remote connection and support for quick fault finding and possible software updates. 

Unscheduled Maintenance

Beneq Field Service Engineer carries out unscheduled maintenance tasks for the ALD reactor to return it back to operation with a minimal delay after the unexpected failure. The Unscheduled Maintenance will be started within 24 to 72 hours after informing Beneq Customer Services. The service will be performed by a highly experienced Field Service Engineer trained especially for the Beneq ALD equipment. Unscheduled maintenance covers also the required service parts. Travel and accommodation will be invoiced separately against actual costs. Any auxiliary components to Beneq ALD reactor, such as vacuum pump, RF-generator, ozone generator or chiller are not in the scope of this contract. In all circumstances Beneq will provide feedback and solution proposal in 24 hours from the initial contact.

Remote Connection and Support

Beneq remote Connection uses eWON technology that offers several benefits: the eWON connection is started inside the customer’s network, no open ports are needed for a firewall from the Internet to the customer's network.

Remote Connection System Specifications:

  •     eWON industrial VPN router.
  •     PLC software remote gateway setup.
  •     HMI PC UltraVNC Server software.


Beneq Field Service Engineer installs Remote Connection System hardware and software at customer’s site.

Remote Connection Service includes Beneq Field Service working time for tool support and troubleshooting up to 20 h/year.

The Customer shall arrange internet access connection to Beneq PLC cabinet. This connection will remain as responsibility of the customer. After installing the Remote Connection System Beneq FSE has access to tool control system to make any necessary troubleshooting or service.

Remote Connection System Overview


  1.     eWON makes connection to Talk2M service.
  2.     Remote Access PC makes also connection to Talk2M service.
  3.     VPN remote access via firewall to all Beneq machine network devices.

Benefits: eWON connection is started inside customer’s network, no open ports needed for firewall from Internet to customer network

On-Demand Equipment Services

For the customers that choose not to select either of our Service Contract models we have on-demand services available. The scheduling of these visits will be agreed case by case by and charging will be according the Beneq ALD standard field service price list. Parts and travelling cost will be charged separately.

The Beneq ALD Lifecycle Services Team consists of highly professional ALD Field Service Engineers trained on Beneq ALD tools. We operate globally and have Field Service Engineers situated in Europe, China, and the USA.


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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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