Introduction

Beneq ALD Lifecycle Services

Beneq ALD Lifecycle Services helps you in all aspects of owning an ALD tool. Whether it is spare parts, maintenance, training or even upgrade of your ALD tool, we got you covered.

The Beneq ALD Lifecycle Services team is a group of highly professional ALD Service Engineers trained on Beneq ALD tools. We operate globally, and we have Field Service Engineers situated in Europe, China, and the USA. 

Spare Parts

Beneq ALD Lifecycle Services offers a dependable spare parts source for Beneq ALD equipment. We guarantee the availability of the spare parts and ensure a perfect fit for all our ALD tools. In most cases, the lead times through us are also the shortest possible due to an extensive stock of the most common spare parts and consumables.

Equipment Upgrades

We support our installed base Customers by providing upgrades for the existing ALD tools to enlarge their capabilities to the new areas of ALD. With our experienced sales engineers and engineering resources, we can come up with solutions for demanding ALD challenges. For example, we have delivered functional reactors for High Aspect Ratio applications and Fluidized Bed Reactors for particle coatings. We can deliver also advanced in-situ metrologies such as Quartz Crystal Microbalance, RGA, and Ellipsometry. 

Maintenance, Support and Training Services

On top of the spares and upgrades Beneq ALD Lifecycle Services produces services that help our customers to gain a maximal return on their investment in Beneq ALD technology. We do this by offering services in three major areas:

Maintenance Contracts and on-demand services

To keep your Beneq ALD tool running we are offering:

  • Extended Life Cycle Services that consist of yearly Preventive Maintenance visits and includes required labor and PM parts. For the ease of budgeting also traveling and accommodation is can be included in the contract.  
  • Premium Life Cycle Services including preventive maintenance and unscheduled maintenance. This service includes required labor and parts to guarantee complete peace of mind. For quick problem solving remote connection set-up is part of the package. Software upgrades both on the PLC and HMI side can be done through the Beneq remote connection.  
  • On-demand services. We have a team of trained professionals to help you if you choose not to select one of our packaged maintenance contracts. Parts and labor will be charged separately.   

Support Services

To enable you to get the best out of your equipment we are proposing:

  • Process support. The Beneq ALD team can arrange expert level process development support both remotely and on your premises for the agreed period from one week to three months. We can support your recipe optimization, result analysis, the design of an experiment, finding best procedure etc. Support includes scheduled follow up in the form of weekly teleconferences and fast response to immediate issues in the form of phone calls and emails.
  • ALD System support. We can support you in the equipment usage by assigning named Field Service Engineer to have a scheduled teleconference on the tool status and guaranteed emergency support with short response times. Remote support through Beneq remote connection is an important part of this support solution.
  • On-site support. An experienced ALD Field Service Engineer working on-site for the agreed period. Eg. 3 months On-site ALD Engineer can support both on Equipment and Process questions. The main goal of this service is to help the Customer to start up the production phase smoothly by being present to help with whatever question or issue may arise

ALD Training

To make sure that your ALD capabilities match your requirements we offer three different type of trainings:

  • Beneq Certified ALD operator training including basic eg. ALD theory, recipe composing and syntax, an operation of the ALD tool and safety aspects. Certification of completion.
  • Beneq Certified ALD maintenance associate including preventive maintenance task and comprehensive preventive maintenance protocol. Certification of completion.  
  • Advanced ALD Process development training including topics such as selection of correct ALD precursors, ALD process parameters and optimization, Advanced ALD process recipe syntax, process development sequence and methodologies and analysis on deposition results.

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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