Beneq WCS 600

Thin film system for industrial OLED encapsulation

Beneq WCS 600 is a roll-to-roll atomic layer deposition system for R&D and pilot production. The system is uniquely suited for demanding thin-film applications in AMOLED displays, OLED lighting, flexible photovoltaics, battery, and coating of flexible glass.

  • Continuous deposition of high quality ALD film onto rolls of flexible substrates such as polymer, metal or paper
  • Low processing temperature (< 150 C) for sensitive substrates
  • Wide operating pressure range for easy line integration
  • System deposition speed is highly scalable, reaching 10 m/min speeds

Technical Specifications

Process type
  • thermal spatial ALD
  • single-sided coating
Usage
  • R&D
  • production
Substrate type
  • polymer
  • metal
  • flexible glass
  • width up to 625 mm
Web speed
  • up to 10 m/min
Main dimensions
  •   2060x 2340 x 2150 mm
Integration
  • stand-alone
  • line integrated
 Process temperature range  up to 150 ºC
 Substrate size (web width)  up to 625 mm
 Substrate material  flexible web such as polymer,

metal, glass or paper

 Web speed 0.05 - 10 m / min
 Roll weight  up to 30 kg
Dynamic deposition weight 10 nm*m / min (for AI2O3)
 Control system  PLC control with PC user
 interface
 Main dimensions, ALD system (L × W × H)  2060 × 2340 × 2150 (mm)
 Main dimensions, Precursor Delivery System 
 (L × W × H)
 1750 × 800 × 1530 (mm)
 Main dimensions, electrical cabinet
 (L × W × H)
 1010 × 320 × 1220 (mm)

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq aerosol thin film equipment is ideal for AR coatings on solar glass.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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