Beneq ALD Tools

Wafer Processing ALD

Automated ALD solutions for high-capacity wafer production. Beneq ALD3 and Beneq ALD4 offer a unique combination of fast batch processing and standard cassette-to-cassette automation. The tool family is perfectly suited for flexible high-volume manufacturing in various wafer-based applications, such as MEMS, LED and OLED.

ALD Research Equipment

The most flexible ALD research equipment ever built for academic research and corporate R&D. Beneq ALD research equipment has been designed to minimize any cross contamination that could happen in a multi-user research environment. Large number of options and upgrades for the most demanding research requirements.

Batch Production ALD

ALD systems designed for diverse use in thin film coating applications in industrial-scale production and multi-project environments. Ideal tools for scaling-up thin film deposition from the R&D phase to full manufacturing. Dependable and industrially proven in both thin film research and robust batch processing.

Roll-to-Roll ALD

Large-area atomic layer deposition systems for flexible substrates in R&D and pilot production. The systems are uniquely suited for demanding thin-film applications in AMOLED displays, OLED lighting, flexible photovoltaics, battery production and coating of flexible glass.

Options and Upgrades

All Beneq products have been designed with flexibility and usability in mind. With the right options and upgrades you will always have the optimal equipment setup that will grow with you. The right configuration will also help you to decrease your valuable production downtime, maintenance, and repair costs.

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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