Automated ALD solutions for high-capacity wafer production. Beneq ALD3 and Beneq ALD4 offer a unique combination of fast batch processing and standard cassette-to-cassette automation. The tool family is perfectly suited for flexible high-volume manufacturing in various wafer-based applications, such as MEMS, LED and OLED.
Beneq ALD Tools

Wafer Processing ALD

ALD Research Equipment
The most flexible ALD research equipment ever built for academic research and corporate R&D. Beneq ALD research equipment has been designed to minimize any cross contamination that could happen in a multi-user research environment. Large number of options and upgrades for the most demanding research requirements.

Batch Production ALD
ALD systems designed for diverse use in thin film coating applications in industrial-scale production and multi-project environments. Ideal tools for scaling-up thin film deposition from the R&D phase to full manufacturing. Dependable and industrially proven in both thin film research and robust batch processing.

Roll-to-Roll ALD
Large-area atomic layer deposition systems for flexible substrates in R&D and pilot production. The systems are uniquely suited for demanding thin-film applications in AMOLED displays, OLED lighting, flexible photovoltaics, battery production and coating of flexible glass.

Options and Upgrades
All Beneq products have been designed with flexibility and usability in mind. With the right options and upgrades you will always have the optimal equipment setup that will grow with you. The right configuration will also help you to decrease your valuable production downtime, maintenance, and repair costs.