Automated ALD solutions for high-capacity wafer production. Beneq ALD3 and Beneq ALD4 offer a unique combination of fast batch processing and standard cassette-to-cassette automation. The tool family is perfectly suited for flexible high-volume manufacturing in various wafer-based applications, such as MEMS, LED and OLED.
Beneq ALD Tools
Wafer Processing ALD
ALD Research Equipment
The most flexible ALD research equipment ever built for academic research and corporate R&D. Beneq ALD research equipment has been designed to minimize any cross contamination that could happen in a multi-user research environment. Large number of options and upgrades for the most demanding research requirements.
Batch Production ALD
ALD systems designed for diverse use in thin film coating applications in industrial-scale production and multi-project environments. Ideal tools for scaling-up thin film deposition from the R&D phase to full manufacturing. Dependable and industrially proven in both thin film research and robust batch processing.
Roll-to-Roll ALD
Large-area atomic layer deposition systems for flexible substrates in R&D and pilot production. The systems are uniquely suited for demanding thin-film applications in AMOLED displays, OLED lighting, flexible photovoltaics, battery production and coating of flexible glass.
Options and Upgrades
All Beneq products have been designed with flexibility and usability in mind. With the right options and upgrades you will always have the optimal equipment setup that will grow with you. The right configuration will also help you to decrease your valuable production downtime, maintenance, and repair costs.
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Application examples
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Backside Passivation for Image Sensors
The CMOS Image Sensor (CIS) market keeps its momentum with double digit growth. Main and sub cameras for smartphone remain the leading application while automotive image sensors have quickly established themselves as second largest segment. These emerging... -
Chip-Level Moisture Barrier
The challenge The device did not pass the highly accelerated stress test (HAST), which tests the device performance after long term high humidity high temperature exposure. The side-walls of the device had to be protected against moisture. The customer... -
Anti-Corrosion Coatings for Equipment Parts
The challenge The fluorine plasma used in semiconductor process equipment causes corrosion in the chamber parts. The existing protective coatings were porous and had particle generation issues inside the wafer processing chamber. The parts are complex... -
Gate Dielectric for Power Devices
Wide bandgap (WBG) power semiconductor devices offer very significant energy efficiency gains in a wide range of applications including automotive, transportation, energy, industrial and consumer. WBG semiconductors such as Gallium Nitride (GaN) and... -
Gate Insulator for Oxide-TFT Display
The challenge Use of Oxide Thin Film Transistor (O-TFT) technology in modern display manufacturing requires a highly conformal and pinhole-free gate dielectric with low hydrogen content. Customer had to find an alternative for PECVD, which was not... -
Encapsulation of OLED microdisplays
Beneq developed a thin-film encapsulation nanolaminate coating for a leading Asian OLED microdisplay manufacturer to enable long lifetime for their microdisplays. -
Insulator for thin film EL displays
An ALD nanolaminate film was developed for Lumineq displays to create a fully pin-hole free thin film insulator layer. -
Top electrode for transparent display
Beneq developed an ALD Transparent Conductive Oxide (TCO) for Lumineq's electroluminescent displays to replace the sputtered IDO that was used in the transparent top electrode. -
Moisture protection of PCBs
Beneq developed a low-temperature ALD moisture barrier solution for a leading supplier of electronics for personal safety monitoring to protect the sensitive circuit board components from moisture. -
Encapsulation of phosphor powder
Beneq provided a moisture barrier solution using ALD for FBR (fluidized-bed reactor) for a leading phosphor material manufacturer to protect the sensitive phosphor powders used in LED lighting from moisture. -
Anti-corrosion coating for LED packaging
Beneq's ALD coating solution solved a leading LED manufacturer's silver reflector corrosion problem by both applying ALD to coat the semi-finished wire-bonded LED assemblies, and by protecting the silver surface with nSilver. -
Metal-like coatings for watch parts
Beneq developed a thin ALD-based optical coating for a leading watch parts manufacturer to both provide a specific color and to protect from corrosion. -
Wafer-level moisture barrier for LED
Beneq provided moisture coating using TFS 200 for a leading LED manufacturer to protect LED dies from moisture and prevent oxidation. -
Bottom DBR for LED lighting
Beneq developed a multi-layer DBR structure on a patterned surface for a leading LED manufacturer. -
Filling of diffractive gratings
Beneq used ALD coating to fill diffractive gratings for a leading optical system manufacturer to keep the gratings free from debris and boost their optical performance. -
Anti-corrosion coating for sensors
The highly conformal and pin-hole free ALD coating solved a leading sensor manufacturer's sensor corrosion problems without compromising sensor sensitivity. -
Buffer layer for CIGS solar panel
Beneq developed a thin, cadmium-free ALD buffer for the solar panels of a leading CGIS solar panel manufacturer. -
Protective coating for Li-ion batteries
Beneq's ultra-thin ALD coating solved a leading Li-ion battery manufacturer's battery corrosion challenges by reducing the fading of battery capacity caused by repeated charge and unload cycles. -
Anti-tarnishing coating for jewelry
Beneq helped Kalevala Jewelry in preventing the discoloration of silver surfaces by providing the patented nSilver industrial-scale protection solution for an ultra-thin, totally conformal, and fully transparent anti-tarnish coating. -
Optical NIR filter on a glass cylinder
Beneq developed a customized batch ALD process for a CCD sensor -based industrial vision systems supplier to coat their near-infrared (NIR) filters. -
Optical coatings for high power laser lenses
Benq developed a conformal high- and low-index multilayer optical coating for a leading provider of high power laser optics and coatings using the TFS 500 batch ALD system. -
Coating of Microchannel Plates (MCP)
Beneq developed an ALD coating solution for microchannel plates (MCP) for Incom, Inc., the world’s largest supplier of rigid fused fiber optics, to allow for significantly greater secondary electron emission . -
Thin-film encapsulation of OLED lighting
Beneq developed a conformal, dense, and pinhole-free Al2O3 and TiO2 barrier coating for a leading OLED lighting panel manufacturer to protect OLED panels from humidity. -
Thin film encapsulation of scintillator plates
Beneq developed a conformal, dense, and pinhole-free low temperature Al2O3 and TiO2 barrier coating for a leading scintillator plate manufacturer to protect scintillator materials from moisture and increase product lifetime and reliability.
