TFS 1200

Thin Film System TFS 1200 for in-line and batch production of buffer layer on CIGS cells

The Beneq TFS 1200 is an application-specific system designed for industrial in-line production of buffer layer coatings on copper-indium-gallium-diselenide (CIGS) thin film solar cells. The maximum substrate size is 1200 × 1200 (mm), a recognized world-record in substrate size in ALD.

More information

Please contact our sales team for details about custom ALD equipment.

Coating specifications

 Materials  Zn(O,S)
 (Zn,Mg)O      (optional)
 Thickness  20 - 50 nm
 Process temperature  120 - 130 °C
 Throughput and productivity
 (for Beneq TFS 1200 in-line coating system)
 panel amount:     5 panels/h (for 50 nm Zn(O,S)
 max. panel size:  1200 × 1200 (mm)
 annual capacity:  ≈ 6.5 MWp/a
  Throughput and productivity
  Beneq TFS 1200 B off-line batch module
  (8 substrates each)
 panel amount:     60 panels/h (for 50 nm Zn(O,S) 
 max. panel size:  1200 x 1600 (mm)
 annual capacity:  ≈ 140 MWp/a

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq aerosol thin film equipment is ideal for AR coatings on solar glass.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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