Beneq C3R

Ultra-fast high precision spatial ALD coating

Beneq C3R™ is the spatial ALD member of our Cluster-compatible equipment family.

Beneq C3R takes the Plasma Enhanced ALD (PEALD) process to a fully new level - for the first time, PEALD can be used in high volume manufacturing. Because of the plasma enhanced rotary ALD process, the Beneq C3R is ideal for thick ALD films, even up to micrometer.

Beneq C3R provides an optimal solution for high performance ALD on wafers in industrial applications, such as optical coatings, insulators and barriers.

The Beneq C3R is the ideal product when speed, cost, low process temperature, and the highest possible film quality are the driving factors.

Techical highlights

  •  For barrier, insulation and anti-corrosion applications for MEMS, LED, OLED, photovoltaics, high power semiconductors, sensors, etc
  •  For up to 300 mm wafers and other round or rectangular substrates
  •  Can be equipped with standard wafer automation.

If you are looking for more information on Beneq C3R and some technical details, please contact our Thin Film Solutions team.

Technical Specifications

Process type
  • rotary spatial plasma
  • enhanced ALD
  • single side coating
  • production
Substrate type
  • up to 300 mm wafer
Substrate loading
  • automatic
  • manual
Main dimensions
  • 1720 x 1340 x 1280 mm
  • cluster


Process temperature range   25 - 500 °C
Batch capacity
  • 7 pcs 300 mm wafer
  • 10 pcs 200 mm wafer
  • 13 pcs 150 mm wafer
  • 18 pcs 100 mm wafer
  • 416 pcs 25 mm optical window
Maximum rotational speed  200 rpm
Depostition rate
  • 34 nm / min AI2O3
  • 24 nm / min SiO2
  • 11 nm / min TiO2
  • 16 nm / min Ta2O5
Plasma gas lines  Up to 3
Precursor lines (ambient to 100 °C)  Up to 3
Plasma type  DC plasma
Control system  PLC control with PC user interface
Main dimensions  1720 x 1340 x 1280 (mm)


Contact Beneq

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Application examples

  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq aerosol thin film equipment is ideal for AR coatings on solar glass.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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