Beneq ALD3 and Beneq ALD4

ALD for flexible high-volume manufacturing

Beneq ALD3™ and Beneq ALD4™ are the automated wafer solutions in Beneq’s equipment portfolio. They offer a unique combination of high capacity batch processing and standard cassette-to-cassette automation..

Beneq C2 wins Compound Semiconductor High Volume Manufacturing Award

Beneq ALD3 and Beneq ALD4 are perfectly suited for high volume manufacturing in various wafer-based applications, including MEMS, LED, OLED, ink-jet print heads and more. The thermal batch ALD process of the Beneq tools is ideal for oxide and nitride processes used for dielectric, conductor, barrier and passivation purposes.

  • Ideal for oxide and nitride films in dielectrics, barriers and passivation applications
  • Industry-standard, robust and reliable wafer automation and handling, SECS/GEM and Semi S2 and S8 compliant
  • Wafer pre-heat option for highest throughput
  • Compact footprint and low cost of ownership.

If you are looking for more information on Beneq ALD3 and Beneq ALD4 and more technical details, please contact our Semicoductor ALD team.

Read more about the CS High-Volume Manufacturing Award 2018 by Compound Semiconductor


Process type
  • Thermal ALD (SW, batch)
  • Single wafer PEALD
  • Production & pilot
  • Up to 4 process modules incl. pre-heat and pre-clean
Substrate type
  • Up to 200 mm wafers
  • Up to 25 wafers/batch
Substrate loading
  • Automatic
  • Mx400 & Mx600
Main dimensions
  • 3000 x 1200 x 1800 mm
  • 3000 x 3000 x 1800 mm
  • Cluster
  • SECS/GEM or GEM300
  • Semi S2 & S8 compliant

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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