Beneq R11

Ultra-fast high precision spatial ALD coating

Beneq R11™ takes the Plasma Enhanced ALD (PEALD) process to a fully new level - for the first time, PEALD can be used in high volume manufacturing. Because of the plasma enhanced rotary ALD process, the Beneq R11 is ideal for thick ALD films, even up to micrometer.

Beneq R11 provides an optimal solution for high performance ALD on wafers in industrial applications, such as optical coatings, insulators and barriers.

The Beneq R11 is the ideal product when speed, cost, low process temperature, and the highest possible film quality are the driving factors.

Contact our sales for more information on Beneq R11.

Techical highlights

  •  For barrier, insulation and anti-corrosion applications for MEMS, LED, OLED, photovoltaics, high power semiconductors, sensors, etc
  •  For up to 200 mm wafers and other round or rectangular substrates
  •  Can be equipped with standard wafer automation

Contact Beneq

Contact Beneq

Application examples

  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq aerosol thin film equipment is ideal for AR coatings on solar glass.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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