Beneq R2

Compact. Scalable. Your perfect start with ALD. 

A premium ALD reactor packaged in a compact enclosure. Ergonomically designed from the ground up for performance and ease of use. Modular design allows for quick upgrades and maintenance.

Peek inside Beneq R2.

Main dimensions: 1200mm x 600mm x 1630mm (W x D x H)
Weight: 500 kg
LIQUID SOURCES
Number of sources: 4
Container volume: 50 ml
Temperature range: RT…40 ºC
Plasma chamber: 200 mm x 3 mm (effective diameter x height)
Particle coating chamber: Flow-through chamber, gross volume 58 ml
REACTION CHAMBER
Operating temperature range: 50…400 ºC
Single wafer chamber: 200 mm x 3 mm (effective diameter x height)
Wafer batch/3D chamber: 200 mm x 95 mm (effective diameter x height)
Plasma chamber: 200 mm x 3 mm (effective diameter x height)
Particle coating chamber: Flow-through chamber, gross volume 58 ml
VACUUM CHAMBER
Heating method: Internal resistive tube heaters with IR reflectors
Cooling method: Air cooling
HEATED SOURCES (optional)
Number of sources:​ 2
Container volume:​ 200 ml
Temperature range:​ RT…200 ºC​
GAS SOURCES (optional)​
Number of sources:​ 1 or 3
PLASMA ALD (optional)​
Principle of operation:​ Capacitively coupled plasma at 13.56 MHz​
Power:​ 300 W​
Number of plasma gases:​ 2
REDUCED-FLOW HIGH-ASPECT RATIO (optional)​
Principle of operation:​ Controlled reduction of exhaust flow to enhance precursor diffusion to high-aspect ratio structures​​

Build your R2.

Build your R2.

  • 4 liquid sources. Uses standard 50 ml Swagelock containers.

  • Single-wafer reaction chamber

  • Spare part and consumables kit

  • Packing and shipping CIP to airport

  • Commissioning and start-up (incl. 3 days onsite)

R2

Choose your addons.

Number of gas sources

Please provide us with your details:

7 + 8 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.

Contact Beneq

3 + 4 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.

Contact Lumineq

1 + 18 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.

Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

Proceed to download

4 + 7 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.