Beneq R2

Compact, scalable. Your perfect ALD research partner at EUR 130 0001

A premium ALD reactor packaged in a compact enclosure. Ergonomically designed from the ground up for performance and ease of use. Modular design allows for quick upgrades and maintenance.

1. Standard thermal ALD setup (see below for details). Final price varies by customer configuration and add-ons.

Peek inside Beneq R2.

Main dimensions: 1200mm x 600mm x 1630mm (W x D x H)
Weight: 500 kg
LIQUID SOURCES
Number of sources: 4
Container volume: 50 ml
Temperature range: RT…40 ºC
Plasma chamber: 200 mm x 3 mm (effective diameter x height)
Particle coating chamber: Flow-through chamber, gross volume 58 ml
REACTION CHAMBER
Operating temperature range: 50…400 ºC
Single wafer chamber: 200 mm x 3 mm (effective diameter x height)
Wafer batch/3D chamber: 200 mm x 95 mm (effective diameter x height)
Plasma chamber: 200 mm x 3 mm (effective diameter x height)
Particle coating chamber: Flow-through chamber, gross volume 58 ml
VACUUM CHAMBER
Heating method: Internal resistive tube heaters with IR reflectors
Cooling method: Air cooling
HEATED SOURCES (optional)
Number of sources:​ 2
Container volume:​ 200 ml
Temperature range:​ RT…200 ºC​
GAS SOURCES (optional)​
Number of sources:​ 1 or 3
PLASMA ALD (optional)​
Principle of operation:​ Capacitively coupled plasma at 13.56 MHz​
Power:​ 300 W​
Number of plasma gases:​ 2
REDUCED-FLOW HIGH-ASPECT RATIO (optional)​
Principle of operation:​ Controlled reduction of exhaust flow to enhance precursor diffusion to high-aspect ratio structures​​

Build your R2

Build your R2

  • 4 liquid sources. Uses standard 50 ml Swagelok containers.

  • Single-wafer reaction chamber

  • Spare part and consumables kit

  • Packing and shipping CIP to airport

  • Commissioning and start-up (incl. 3 days onsite)

R2

Contact Lumineq

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.