Beneq sells Roll-to-Roll ALD system to UK’s Centre for Process Innovation

The Centre for Process Innovation (CPI), has selected Beneq’s roll-to-roll ALD unit for their thin-film barrier development platform. Beneq is a leading ALD equipment supplier that has been developing roll-to-roll ALD based on spatial atomic layer deposition (ALD) since 2008. The equipment will be delivered to CPI in England in Q2 of 2014.

Beneq has signed an agreement with CPI to deliver roll-to-roll (R2R) ALD equipment to CPI’s NETPark facilities in Sedgefield in North East England. Beneq was chosen as the result of a public tendering procedure.

“We are very pleased and proud to have been chosen by CPI as their partner to deliver the R2R ALD system,” says Dr Mikko Söderlund, Technical Sales Director, Beneq. “CPI is a forerunner in the development of ALD-based flexible thin-film moisture barrier technology for demanding flexible electronics applications. They are a perfect partner for us to jointly develop the technology further and make it accessible to the industry.”

CPI has been evaluating R2R ALD technology for several years. “We selected Beneq’s R2R ALD system because we were looking for a scalable and robust platform for our product- and application-specific development and pilot production work. Beneq have years of experience in industrial ALD applications and production to bring confidence to the R2R environment and allow our fast progress in the field. Our first goal is to develop full system technologies and processes to the field of clear flexible barrier encapsulation and substrate materials. Here we see higher performance and lower cost potential that is commercially scalable with inclusion of R2R ALD processing. We also envisage that R2R ALD will play further important roles in various aspects of flexible ‘plastic electronics’, where highly conformal nanoscale thin films are required. We certainly believe the future is bright for R2R ALD applications and we are pleased to collaborate with Beneq to make this a reality and deliver to the global market’’ says Dr Alf Smith, Vacuum Coating Technology Specialist at CPI.

ALD-based thin films are conformal and pinhole-free and therefore ideally suited for demanding thin film applications. Typical application examples include encapsulation of flexible photovoltaics and OLEDs. Cost of conventional multilayer barrier films are prohibitively high for such applications; a single layer inorganic barrier film, can be produced by roll-to-roll ALD technology, providing a cost-efficient solution. With the development of the world’s first commercial roll-to-roll ALD system, Beneq has paved the way for producing ultra barrier films at significantly lower cost.

Beneq’s R2R ALD technology has been selected by CPI in the UK for
demanding moisture barrier applications. The unit, WCS 500, is capable
of coating 500 mm wide webs.

The Centre for Process Innovation is a UK-based technology innovation hub and part of the High Value Manufacturing Catapult. CPI uses applied knowledge in science and engineering combined with state-of-the-art facilities to enable their clients to develop, prove, prototype and scale up the next generation of products and processes. CPI’s project has been part funded by European Regional Development Funds 2007-2013.

For more information, please contact:
Mr Sampo Ahonen, CEO, Beneq
Tel: +358 40 520 1090
e-mail: sampo.ahonen(at)

Dr. Alf Smith, Research and Development Manager, CPI
Tel: +44 (0) 1740 625 732
e-mail: alf.smith(at)

Beneq, a leading supplier of production and research equipment for thin film coatings, is also the world’s premier manufacturer and developer of thin film electroluminescent (TFEL) displays. Beneq thin film equipment is used for thin film coatings in solar photovoltaics, flexible electronics, strengthened glass and other emerging thin film applications. Industry-proven Beneq equipment and thin film experience is used for improving the efficiency of crystalline silicon and thin film solar cells, producing transparent conductive oxide (TCO) coated glass and making touch screen glass more durable. Beneq has introduced several revolutionary innovations within its coating technologies, including roll-to-roll atomic layer deposition (ALD) and high-yield atmospheric aerosol coating (nAERO®). In addition to process equipment, Beneq also offers Thin Film Coating Services.

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq aerosol thin film equipment is ideal for AR coatings on solar glass.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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