Beneq announces OLED thin film encapsulation R&D system delivery to Fraunhofer COMEDD

Beneq, a global supplier of thin film coating equipment, announces the availability of an R&D thin film encapsulation system for 200×200 mm OLED substrates. The first system will be delivered in the summer of 2013 as part of an atomic layer deposition (ALD) project to the German-based Fraunhofer COMEDD.

This research platform has been specifically designed together with the Fraunhofer Research Institution for Organics, Materials and Electronic Devices, known as COMEDD, which is an independent research institution of the Fraunhofer-Gesellschaft. Fraunhofer COMEDD offers a wide range of research, development and pilot production possibilities, especially for OLED lighting, organic solar cells and OLED microdisplays.

“We are honored to collaborate with Fraunhofer COMEDD to realize this particular OLED thin film encapsulation system,” says Dr Mikko Söderlund, Director of Technical Sales at Beneq. “This new cluster integrated R&D system with face-down processing sets a new standard in thin film encapsulation quality and flexibility. We look forward to witnessing new, ALD-enabled OLED and organic photovoltaic (OPV) designs from COMEDD.”

What makes the Beneq OLED thin film encapsulation system unique from a technical point of view is that it is based on a cross-flow reactor, which has been optimized for the shortest possible cycle time, even at low processing temperatures, such as <100 °C. This feature facilitates rapid prototyping of new OLED designs. Most importantly, the cross-flow reactor design enables process scale-up for large areas and high throughput, which is compatible with industrial requirements. The R&D system for 200×200 mm substrates is available as a stand-alone system and it can also be integrated with an MBraun glove box.

Beneq has been invited as a sponsor and speaker at Fraunhofer COMEDD’s first Industry Partners Day, which takes place in Dresden, Germany, on April 10, 2013.

The ALD encapsulation R&D system will be delivered in the summer of 2013.

For more information, please contact:
Dr Tommi Vainio, Vice President
Thin Film Equipment, Beneq
Tel: +358 40 570 7502
e-mail: tommi.vainio(at)

Beneq, based in Finland, is a leading supplier of production and research equipment for thin film coatings, as well as the world’s premier manufacturer and developer of thin film electroluminescent (TFEL) displays. Beneq thin film equipment is used for thin film coatings in solar photovoltaics, flexible electronics, strengthened glass and other emerging thin film applications. Industry-proven Beneq equipment and thin film experience is used for improving the efficiency of crystalline silicon and thin film solar cells, producing transparent conductive oxide (TCO) coated glass and making touch screen glass more durable. Beneq has introduced several revolutionary innovations within its coating technologies, including roll-to-roll atomic layer deposition (ALD) and high-yield atmospheric aerosol coating (nAERO®). In addition to process equipment, Beneq also offers complete coating services.

Beneq and nAERO are registered trademarks of Beneq Oy.

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq aerosol thin film equipment is ideal for AR coatings on solar glass.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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