Latest Thin film news

11 February 2020 Blog post

Professor Jan Macák of the University of Pardubice explores ALD for coating nanostructures. Using Beneq's TFS 200 tool with a stop-flow option he and his team are able to significantly increase light absorption using TiO2 nanotubes, creating more efficient solar cells.
Learn more here.

11 February 2020 News

Thanks to its luminescence properties there has been a lot of research on red color emission using europium-doped phosphors Y2O3−xSx:Eu (YOS:Eu). Our team at Beneq discovered that, by using ALD, it is possible to emit new colors such as blue/violet by controlling the europium oxidation state.

Learn more here.

11 February 2020 News

It's here. Beneq R2 retails for EUR 130 000/ USD 145 000, making it our most affordable tool yet. We’re raising the bar for what universities have come to expect from entry-level ALD research equipment with new features and add-on options such as plasma, while lowering the total investment.

Learn more here.

9 February 2020 News

Moisture barriers are a key application of ALD in 2019. Its pinhole-free, conformal properties offer the ultimate protection against humidity - for printed circuit boards (PCBs) and other electronic devices.

Learn more from our white paper on ALD Moisture Barriers here.

25 September 2019 News

Grenoble, France – Beneq, a leading provider of ALD R&D and production technology, today announced the BENEQ TransformTM. A versatile ALD platform it is particularly useful for More-than-Moore device fabrication, OLED and virtual reality applications.

22 July 2019 News

Bellevue, Washington, USA – Beneq today unveiled R2, a compact modular platform that makes it dramatically easier for universities, research institutes and enterprises to start advanced ALD research. Completely redesigned from the ground up with ergonomics in mind, the basic R2 model comes fully equipped for thermal ALD. With flexible add-on options customers can easily expand to other advanced processes such as plasma, batch processing, powder ALD, and reduced flow.

18 June 2019 Blog post

Scintillates are one of the oldest types of radiation detector because initially measurements could be made with photographic film. Images could be collected, or intensity measurements made. Measurements could even be made with the human eye observing the brightness of frequency of flashes in the scintillator. Nowadays, the light output is converted into data that are processed using compact photodiodes. Scintillators come in different types, and in this edition of the blog, we look at Beneq’s ALD encapsulation solutions.

27 May 2019 Blog post

In this technical blog we describe how ALD can be utilized for coating high curvature optics using spherical domes as an example. The challenge when coating 3D optics is to deposit the coating with high uniformity over an arbitrary topology in a simple manner. ALD has proven its suitability for high precision pinhole free films, where the challenge is not only to achieve uniformity over a large scale, but to coat conformally over high aspect ratio structures.

11 April 2019 Blog post

Proper environmental encapsulation of circuit boards and tin whisker suppression are essential for assuring high reliability of electronics applications in harsh environments. Atomic Layer Deposition offers the best available protection without the drawbacks of parylene coatings.

18 March 2019 Blog post

In industrial applications, and specifically in semiconductor processing equipment applications, damage and failure of metal components results from exposure to reactive chemicals. Atomic layer deposition (ALD) offers qualities that enable the deposition of high-quality anti-corrosion barrier layers.

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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