In industrial applications, and specifically in semiconductor processing equipment applications, damage and failure of metal components results from exposure to reactive chemicals. Atomic layer deposition (ALD) offers qualities that enable the deposition of high-quality anti-corrosion barrier layers.
Latest Thin film news
15 November 2018
Blog post
Atomic Layer Deposition (ALD) is an unmatchable moisture barrier and encapsulation solution for electronics and semiconductor components. The ultra-thin ALD moisture protection can be applied in different phases of the production process: wafer-level, chip-level, package or module-level, and/or Assembled Printed Circuit Board (PCBA) level.
15 November 2018
Blog post
Atomic Layer Deposition (ALD) is truly the ultimate moisture barrier. With ALD, it is possible to create moisture barriers that are thinner and keep humidity and vapors out better than other hermetic packaging options. ALD offers the only way to create conformal ultra-thin protective coatings on surfaces with high aspect ratios and complex 3D shapes. ALD is also a great solution for encapsulating sensitive surfaces.
11 September 2018
Blog post
Reliable, quality maintenance from Beneq Lifecycle Services guarantees you will get the most out of your ALD equipment investment with reduced downtime. Take a look at our maintenance services FAQ.
2 August 2018
Blog post
With an extremely thin ALD coating, you can block moisture effectively and minimize electronic component maintenance.
17 May 2018
Blog post
There is a need for lithium-ion batteries that can be charged faster in a safe manner, and that do not experience capacity loss due to charging and discharging them over and over again. Luckily atomic layer deposition (ALD) can solve many of the issues the Li-ion batteries are faced with. Beneq’s WCS 600 roll-2-roll equipment can easily and quickly coat electrode or separator sheets. If you want to be a technology leader in safer, high-performing batteries, ALD is the answer!
9 April 2018
Blog post
Beneq C2 wins the High-Volume Manufacturing Award in the CS International Conference. Beneq C2, the automated wafer ALD solution in Beneq’s cluster-compatible equipment portfolio, is the winner in the High-Volume Manufacturing category of the CS Industry Awards, where the industry experts have been able to vote for their favorites.
15 March 2018
Blog post
Markus Bosund will be defending his PhD thesis on atomic layer deposition (ALD) and nanotechnology on Friday, March 23, at Aalto University.
7 March 2018
Blog post
Atomic layer deposition (ALD) takes moisture protection to a completely new level by providing pin-hole free coating on even the most complex high ratio surfaces.
5 March 2018
Blog post
Learn how you can achieve cost-effective atomic layer deposition (ALD) film growth with continuous roll-to-roll systems.
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Application examples
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Backside Passivation for Image Sensors
The CMOS Image Sensor (CIS) market keeps its momentum with double digit growth. Main and sub cameras for smartphone remain the leading application while automotive image sensors have quickly established themselves as second largest segment. These emerging... -
Chip-Level Moisture Barrier
The challenge The device did not pass the highly accelerated stress test (HAST), which tests the device performance after long term high humidity high temperature exposure. The side-walls of the device had to be protected against moisture. The customer... -
Anti-Corrosion Coatings for Equipment Parts
The challenge The fluorine plasma used in semiconductor process equipment causes corrosion in the chamber parts. The existing protective coatings were porous and had particle generation issues inside the wafer processing chamber. The parts are complex... -
Gate Dielectric for Power Devices
Wide bandgap (WBG) power semiconductor devices offer very significant energy efficiency gains in a wide range of applications including automotive, transportation, energy, industrial and consumer. WBG semiconductors such as Gallium Nitride (GaN) and... -
Gate Insulator for Oxide-TFT Display
The challenge Use of Oxide Thin Film Transistor (O-TFT) technology in modern display manufacturing requires a highly conformal and pinhole-free gate dielectric with low hydrogen content. Customer had to find an alternative for PECVD, which was not... -
Encapsulation of OLED microdisplays
Beneq developed a thin-film encapsulation nanolaminate coating for a leading Asian OLED microdisplay manufacturer to enable long lifetime for their microdisplays. -
Insulator for thin film EL displays
An ALD nanolaminate film was developed for Lumineq displays to create a fully pin-hole free thin film insulator layer. -
Top electrode for transparent display
Beneq developed an ALD Transparent Conductive Oxide (TCO) for Lumineq's electroluminescent displays to replace the sputtered IDO that was used in the transparent top electrode. -
Moisture protection of PCBs
Beneq developed a low-temperature ALD moisture barrier solution for a leading supplier of electronics for personal safety monitoring to protect the sensitive circuit board components from moisture. -
Encapsulation of phosphor powder
Beneq provided a moisture barrier solution using ALD for FBR (fluidized-bed reactor) for a leading phosphor material manufacturer to protect the sensitive phosphor powders used in LED lighting from moisture. -
Anti-corrosion coating for LED packaging
Beneq's ALD coating solution solved a leading LED manufacturer's silver reflector corrosion problem by both applying ALD to coat the semi-finished wire-bonded LED assemblies, and by protecting the silver surface with nSilver. -
Metal-like coatings for watch parts
Beneq developed a thin ALD-based optical coating for a leading watch parts manufacturer to both provide a specific color and to protect from corrosion. -
Wafer-level moisture barrier for LED
Beneq provided moisture coating using TFS 200 for a leading LED manufacturer to protect LED dies from moisture and prevent oxidation. -
Bottom DBR for LED lighting
Beneq developed a multi-layer DBR structure on a patterned surface for a leading LED manufacturer. -
Filling of diffractive gratings
Beneq used ALD coating to fill diffractive gratings for a leading optical system manufacturer to keep the gratings free from debris and boost their optical performance. -
Anti-corrosion coating for sensors
The highly conformal and pin-hole free ALD coating solved a leading sensor manufacturer's sensor corrosion problems without compromising sensor sensitivity. -
Buffer layer for CIGS solar panel
Beneq developed a thin, cadmium-free ALD buffer for the solar panels of a leading CGIS solar panel manufacturer. -
Protective coating for Li-ion batteries
Beneq's ultra-thin ALD coating solved a leading Li-ion battery manufacturer's battery corrosion challenges by reducing the fading of battery capacity caused by repeated charge and unload cycles. -
Anti-tarnishing coating for jewelry
Beneq helped Kalevala Jewelry in preventing the discoloration of silver surfaces by providing the patented nSilver industrial-scale protection solution for an ultra-thin, totally conformal, and fully transparent anti-tarnish coating. -
Optical NIR filter on a glass cylinder
Beneq developed a customized batch ALD process for a CCD sensor -based industrial vision systems supplier to coat their near-infrared (NIR) filters. -
Optical coatings for high power laser lenses
Benq developed a conformal high- and low-index multilayer optical coating for a leading provider of high power laser optics and coatings using the TFS 500 batch ALD system. -
Coating of Microchannel Plates (MCP)
Beneq developed an ALD coating solution for microchannel plates (MCP) for Incom, Inc., the world’s largest supplier of rigid fused fiber optics, to allow for significantly greater secondary electron emission . -
Thin-film encapsulation of OLED lighting
Beneq developed a conformal, dense, and pinhole-free Al2O3 and TiO2 barrier coating for a leading OLED lighting panel manufacturer to protect OLED panels from humidity. -
Thin film encapsulation of scintillator plates
Beneq developed a conformal, dense, and pinhole-free low temperature Al2O3 and TiO2 barrier coating for a leading scintillator plate manufacturer to protect scintillator materials from moisture and increase product lifetime and reliability.