Professor Jan Macák of the University of Pardubice explores ALD for coating nanostructures. Using Beneq's TFS 200 tool with a stop-flow option he and his team are able to significantly increase light absorption using TiO2 nanotubes, creating more efficient solar cells.
Learn more here.
Latest Thin film news
11 February 2020
Blog post
11 February 2020
News
Thanks to its luminescence properties there has been a lot of research on red color emission using europium-doped phosphors Y2O3−xSx:Eu (YOS:Eu). Our team at Beneq discovered that, by using ALD, it is possible to emit new colors such as blue/violet by controlling the europium oxidation state.
Learn more here.
11 February 2020
News
It's here. Beneq R2 retails for EUR 130 000/ USD 145 000, making it our most affordable tool yet. We’re raising the bar for what universities have come to expect from entry-level ALD research equipment with new features and add-on options such as plasma, while lowering the total investment.
Learn more here.
9 February 2020
News
Moisture barriers are a key application of ALD in 2019. Its pinhole-free, conformal properties offer the ultimate protection against humidity - for printed circuit boards (PCBs) and other electronic devices.
Learn more from our white paper on ALD Moisture Barriers here.
25 September 2019
News
Grenoble, France – Beneq, a leading provider of ALD R&D and production technology, today announced the BENEQ TransformTM. A versatile ALD platform it is particularly useful for More-than-Moore device fabrication, OLED and virtual reality applications.
22 July 2019
News
Bellevue, Washington, USA – Beneq today unveiled R2, a compact modular platform that makes it dramatically easier for universities, research institutes and enterprises to start advanced ALD research. Completely redesigned from the ground up with ergonomics in mind, the basic R2 model comes fully equipped for thermal ALD. With flexible add-on options customers can easily expand to other advanced processes such as plasma, batch processing, powder ALD, and reduced flow.
18 June 2019
Blog post
Scintillates are one of the oldest types of radiation detector because initially measurements could be made with photographic film. Images could be collected, or intensity measurements made. Measurements could even be made with the human eye observing the brightness of frequency of flashes in the scintillator. Nowadays, the light output is converted into data that are processed using compact photodiodes. Scintillators come in different types, and in this edition of the blog, we look at Beneq’s ALD encapsulation solutions.
27 May 2019
Blog post
In this technical blog we describe how ALD can be utilized for coating high curvature optics using spherical domes as an example. The challenge when coating 3D optics is to deposit the coating with high uniformity over an arbitrary topology in a simple manner. ALD has proven its suitability for high precision pinhole free films, where the challenge is not only to achieve uniformity over a large scale, but to coat conformally over high aspect ratio structures.
11 April 2019
Blog post
Proper environmental encapsulation of circuit boards and tin whisker suppression are essential for assuring high reliability of electronics applications in harsh environments. Atomic Layer Deposition offers the best available protection without the drawbacks of parylene coatings.
18 March 2019
Blog post
In industrial applications, and specifically in semiconductor processing equipment applications, damage and failure of metal components results from exposure to reactive chemicals. Atomic layer deposition (ALD) offers qualities that enable the deposition of high-quality anti-corrosion barrier layers.
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Application examples
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Backside Passivation for Image Sensors
The CMOS Image Sensor (CIS) market keeps its momentum with double digit growth. Main and sub cameras for smartphone remain the leading application while automotive image sensors have quickly established themselves as second largest segment. These emerging... -
Chip-Level Moisture Barrier
The challenge The device did not pass the highly accelerated stress test (HAST), which tests the device performance after long term high humidity high temperature exposure. The side-walls of the device had to be protected against moisture. The customer... -
Anti-Corrosion Coatings for Equipment Parts
The challenge The fluorine plasma used in semiconductor process equipment causes corrosion in the chamber parts. The existing protective coatings were porous and had particle generation issues inside the wafer processing chamber. The parts are complex... -
Gate Dielectric for Power Devices
Wide bandgap (WBG) power semiconductor devices offer very significant energy efficiency gains in a wide range of applications including automotive, transportation, energy, industrial and consumer. WBG semiconductors such as Gallium Nitride (GaN) and... -
Gate Insulator for Oxide-TFT Display
The challenge Use of Oxide Thin Film Transistor (O-TFT) technology in modern display manufacturing requires a highly conformal and pinhole-free gate dielectric with low hydrogen content. Customer had to find an alternative for PECVD, which was not... -
Encapsulation of OLED microdisplays
Beneq developed a thin-film encapsulation nanolaminate coating for a leading Asian OLED microdisplay manufacturer to enable long lifetime for their microdisplays. -
Insulator for thin film EL displays
An ALD nanolaminate film was developed for Lumineq displays to create a fully pin-hole free thin film insulator layer. -
Top electrode for transparent display
Beneq developed an ALD Transparent Conductive Oxide (TCO) for Lumineq's electroluminescent displays to replace the sputtered IDO that was used in the transparent top electrode. -
Moisture protection of PCBs
Beneq developed a low-temperature ALD moisture barrier solution for a leading supplier of electronics for personal safety monitoring to protect the sensitive circuit board components from moisture. -
Encapsulation of phosphor powder
Beneq provided a moisture barrier solution using ALD for FBR (fluidized-bed reactor) for a leading phosphor material manufacturer to protect the sensitive phosphor powders used in LED lighting from moisture. -
Anti-corrosion coating for LED packaging
Beneq's ALD coating solution solved a leading LED manufacturer's silver reflector corrosion problem by both applying ALD to coat the semi-finished wire-bonded LED assemblies, and by protecting the silver surface with nSilver. -
Metal-like coatings for watch parts
Beneq developed a thin ALD-based optical coating for a leading watch parts manufacturer to both provide a specific color and to protect from corrosion. -
Wafer-level moisture barrier for LED
Beneq provided moisture coating using TFS 200 for a leading LED manufacturer to protect LED dies from moisture and prevent oxidation. -
Bottom DBR for LED lighting
Beneq developed a multi-layer DBR structure on a patterned surface for a leading LED manufacturer. -
Filling of diffractive gratings
Beneq used ALD coating to fill diffractive gratings for a leading optical system manufacturer to keep the gratings free from debris and boost their optical performance. -
Anti-corrosion coating for sensors
The highly conformal and pin-hole free ALD coating solved a leading sensor manufacturer's sensor corrosion problems without compromising sensor sensitivity. -
Buffer layer for CIGS solar panel
Beneq developed a thin, cadmium-free ALD buffer for the solar panels of a leading CGIS solar panel manufacturer. -
Protective coating for Li-ion batteries
Beneq's ultra-thin ALD coating solved a leading Li-ion battery manufacturer's battery corrosion challenges by reducing the fading of battery capacity caused by repeated charge and unload cycles. -
Anti-tarnishing coating for jewelry
Beneq helped Kalevala Jewelry in preventing the discoloration of silver surfaces by providing the patented nSilver industrial-scale protection solution for an ultra-thin, totally conformal, and fully transparent anti-tarnish coating. -
Optical NIR filter on a glass cylinder
Beneq developed a customized batch ALD process for a CCD sensor -based industrial vision systems supplier to coat their near-infrared (NIR) filters. -
Optical coatings for high power laser lenses
Benq developed a conformal high- and low-index multilayer optical coating for a leading provider of high power laser optics and coatings using the TFS 500 batch ALD system. -
Coating of Microchannel Plates (MCP)
Beneq developed an ALD coating solution for microchannel plates (MCP) for Incom, Inc., the world’s largest supplier of rigid fused fiber optics, to allow for significantly greater secondary electron emission . -
Thin-film encapsulation of OLED lighting
Beneq developed a conformal, dense, and pinhole-free Al2O3 and TiO2 barrier coating for a leading OLED lighting panel manufacturer to protect OLED panels from humidity. -
Thin film encapsulation of scintillator plates
Beneq developed a conformal, dense, and pinhole-free low temperature Al2O3 and TiO2 barrier coating for a leading scintillator plate manufacturer to protect scintillator materials from moisture and increase product lifetime and reliability.