Meet Beneq at Semicon Europa 2018

Semicon Europa 2018

Tuesday, November 13, 2018 to Friday, November 16, 2018

The Latest in ALD Throughput Revolution - Hall A4, booth 551

Come and visit us in Semicon Europa and hear all about the latest version of our award-winning Beneq C2 automated wafer batch ALD platform.

Beneq C2 highlights

• Ideal for oxide and nitride films in dielectric, barrier and passivation applications

• Industry-standard, robust and reliable wafer automation and handling

• Wafer pre-heat option for highest throughput

• Compact footprint and low cost-of-ownership.

The Invisible Advantage

The latest high-throughput ALD equipment from Beneq have been created with a special focus on emerging ALD markets, such as moisture barriers, passivation, insulators, anti-corrosion coatings for 

  • Power Si & WBG
  • RF GaAs, GaN and Si
  • MEMS, sensors and actuators
  • Image sensors
  • LED and OLED


Should you want to book a meeting with us in Semicon Europa to hear the latest news about the ALD throughput revolution in the semiconductor industry, you can contact us with the form below.

You can also find us in Hall A4, stand 551. See you there!


By submitting this form you accept the Beneq privacy terms.

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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