Beneq Lotus rotary ALD

A Plasma-go-round

New rotary spatial ALD equipment introduced

We have been sharing stories about our spatial ALD equipment in this blog a few times (it is an important and expanding part of our product portfolio). Now there is more to tell again.

Earlier today we shared news about the next solution in our spatial ALD equipment family: A new rotary spatial reactor we are developing based on technology we have licensed from Lotus Applied Technology.

Plasma in rotary spatial ALD equipment 1

The target is to provide a cost-effective industrial solution for barriers and passivation, insulation and protection of for example MEMS, LED, OLED, photovoltaics, memory components, batteries and sensors.

More information about the Vortex rotary ALD technology is available on the LotusAT webpages and you can read the details of the announcement from the Beneq news page, but we wanted to post the news here too. If for no other reason than to share more nice plasma pictures of the demo equipment.

Plasma in rotary spatial ALD equipment 2

If you are in need of for example high precision optical coatings for improving the optical performance of LEDs, IR cut-off filters, lenses, diffractive optics - or any demanding wafer-based coating solution, fill in your information to the fields on the left for more information and come and see the demo equipment.

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.