PEALD reaches a new level

Development of Atomic Layer Deposition Processes for Nanotechnology Applications

Come and listen to Markus Bosund's doctoral dissertation on atomic layer deposition (ALD) and nanotechnology at Aalto University's Department of Electronics and Nanoengineering on Friday, March 23, 2018!

Markus Bosund will be defending his PhD thesis Development of Atomic Layer Deposition Processes for Nanotechnology Applications.

ALD is based on surface controlled thin film deposition. During coating, two or more chemical vapors or gaseous precursors react sequentially on the substrate surface, producing a solid thin film.

In his work, Markus shows two new low-temperature methods for the passivation of GaAs surfaces, and studies the film properties of plasma ALD (PEALD) grown AIN.

Markus also presents a new deposition process for Yb203 thin films, and investigates the use of titanium dioxide films for photocatalytic applications. Photocatalytic processes have multiple uses, for example they can be used as sterilization methods for prostheses.

Markus's opponent is Professor Ola Nilsen from the University of Oslo, Norway.


Markus Bosund will be defending his thesis
'Development of Atomic Layer Deposition Processes
for Nanotechnology Applications' at Aalto University
on Friday, March 23

Congratulations to Markus, and all the best for defending your dissertation on Friday!

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq aerosol thin film equipment is ideal for AR coatings on solar glass.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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