Beneq R11 - ultra-fast spatial ALD

m2 is the new mm2

Beneq moves industrial ALD to the next level

We are all set for ALD2016, the 16th International Conference on Atomic Layer Deposition, in Dublin next week. It is time for exciting product news.

We are introducing two new products that move the capacity of industrial ALD equipment to the next level. As Tommi says in our news release, our target is to revolutionize the coating speed standards in the ALD industry. When it comes to ALD coating throughput, m2 is the new mm2.

With the launch of the new products, we are also updating our product naming conventions to match the new standards of coating areas in industrial ALD production. We feel this is like a monetary reform. When the ALD capacity moves to the next level, it is time to remove the unnecessary zeros.

The new Beneq R11 is a great example of the paradigm change: the chamber is over a meter wide and spins so fast that deposition rates of over a µm per hour are possible. It starts a new era of PEALD for high volume manufacturing of optical coatings, barrier films and insulators.

While spatial ALD solutions, such as the Beneq R11 and our large-area spatial ALD equipment, are in the core of our product development, we are also making batch processing faster. The other new product we are launching in in ALD2016 combines high capacity batch processing and standard cassette-to-cassette automation. Beneq T2S is perfectly suited for high volume manufacturing of wafer-based applications, face up or face down.

With these product launches, the Beneq ALD Boat Bar, and all the interesting presentations and application examples, ALD2016 is going to be a great event.

Get in touch with our team in Dublin to get all the details of the new products. Our booth number is 30. If you will not be in Dublin, you can ask more from our sales team.

Contact Lumineq

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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